JPS528878A - Semiconductor negative pressure sensor - Google Patents

Semiconductor negative pressure sensor

Info

Publication number
JPS528878A
JPS528878A JP8448975A JP8448975A JPS528878A JP S528878 A JPS528878 A JP S528878A JP 8448975 A JP8448975 A JP 8448975A JP 8448975 A JP8448975 A JP 8448975A JP S528878 A JPS528878 A JP S528878A
Authority
JP
Japan
Prior art keywords
pressure sensor
negative pressure
semiconductor negative
semiconductor
cost reduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8448975A
Other languages
Japanese (ja)
Inventor
Masanori Tanabe
Yasumasa Matsuda
Kazumichi Kimura
Kosuke Nakamura
Tadao Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8448975A priority Critical patent/JPS528878A/en
Publication of JPS528878A publication Critical patent/JPS528878A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: A semiconductor negative pressure sensor which decreases bad influences to characteristics caused by temperature fluctuation with enough cost reduction.
COPYRIGHT: (C)1977,JPO&Japio
JP8448975A 1975-07-11 1975-07-11 Semiconductor negative pressure sensor Pending JPS528878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8448975A JPS528878A (en) 1975-07-11 1975-07-11 Semiconductor negative pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8448975A JPS528878A (en) 1975-07-11 1975-07-11 Semiconductor negative pressure sensor

Publications (1)

Publication Number Publication Date
JPS528878A true JPS528878A (en) 1977-01-24

Family

ID=13832056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8448975A Pending JPS528878A (en) 1975-07-11 1975-07-11 Semiconductor negative pressure sensor

Country Status (1)

Country Link
JP (1) JPS528878A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58211615A (en) * 1982-06-02 1983-12-09 Hitachi Ltd High pressure sensor
JPS6194741U (en) * 1984-11-27 1986-06-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58211615A (en) * 1982-06-02 1983-12-09 Hitachi Ltd High pressure sensor
JPS6194741U (en) * 1984-11-27 1986-06-18

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