JPS6194741U - - Google Patents
Info
- Publication number
- JPS6194741U JPS6194741U JP17989784U JP17989784U JPS6194741U JP S6194741 U JPS6194741 U JP S6194741U JP 17989784 U JP17989784 U JP 17989784U JP 17989784 U JP17989784 U JP 17989784U JP S6194741 U JPS6194741 U JP S6194741U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- space
- sensitive element
- case
- outside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 5
- 230000005540 biological transmission Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims 2
- 239000010935 stainless steel Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000009530 blood pressure measurement Methods 0.000 claims 1
- 239000013013 elastic material Substances 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は、本考案の第１実施例の断面図、第２
図は前記実施例を用いた測定流体導入例の要部断
面図、第３図は本考案の第２実施例の要部断面図
、第４図は従来の圧力検出器の断面図、第５図は
従来の前記と異なる圧力検出器の断面である。
１：ケース、２：受圧ダイアフラム、４：支持
台、５：感圧素子、５ａ：第１空間、１１：第２
空間、１４：保護膜、１５：測定圧力室、１６：
圧力伝達流体、１８：測定流体導入管、３１：受
圧空間、３２：連通路。
FIG. 1 is a sectional view of the first embodiment of the present invention, and the second
The figure is a cross-sectional view of a main part of an example of introducing a measuring fluid using the above embodiment, FIG. 3 is a cross-sectional view of a main part of a second embodiment of the present invention, FIG. 4 is a cross-sectional view of a conventional pressure detector, and The figure is a cross section of a conventional pressure sensor different from the one described above. 1: Case, 2: Pressure-receiving diaphragm, 4: Support base, 5: Pressure-sensitive element, 5a: First space, 11: Second
Space, 14: Protective film, 15: Measurement pressure chamber, 16:
Pressure transmission fluid, 18: Measurement fluid introduction pipe, 31: Pressure receiving space, 32: Communication path.
Claims (1)
皿状の半導体感圧素子（以下感圧素子という）を
支持台の端面に密封的に接合して該端面との間に
第１の空間を形成し、前記感圧素子と支持台との
接台体を閉鎖ケース内に収納して該ケースの内部
空間を第２の空間とし、前記第１の空間から連通
路をケース外に導出して該連通路に通じるように
受圧ダイヤフラムにより密封的に閉鎖された受圧
空間をケースの外側に形成し、該受圧空間、前記
連通路および前記第１の空間に外部とは隔離され
た圧力伝達流体を封入し、前記受圧ダイアフラム
の外側から加えられ圧力伝達流体を介して前記第
１の空間に伝えられる圧力を測定圧力とし、前記
第２の空間内の圧力を基準圧力として前記感圧素
子からの圧力測定信号をケース外に取り出すよう
にしたことを特徴とする圧力検出器。 (2) 実用新案登録請求の範囲第１項記載の検出
器において、受圧ダイアフラムがステンレス鋼か
らなる薄膜であり、かつ弾性材料からなる保護膜
を前記ステンレス鋼からなる薄膜の外側に設けた
ことを特徴とする圧力検出器。[Claims for Utility Model Registration] (1) A dish-shaped semiconductor pressure-sensitive element (hereinafter referred to as pressure-sensitive element) whose bottom part is configured as a pressure-sensitive diaphragm is hermetically bonded to the end face of a support base so that the end face and A first space is formed between the pressure-sensitive element and the support base, the contact body of the pressure-sensitive element and the support base is housed in a closed case, and the internal space of the case is used as a second space, and a communication path is formed from the first space. A pressure receiving space hermetically closed by a pressure receiving diaphragm is formed outside the case so that the pressure receiving space leads out of the case and communicates with the communication path, and the pressure receiving space, the communication path and the first space are connected to the outside. An isolated pressure transmission fluid is enclosed, the pressure applied from the outside of the pressure receiving diaphragm and transmitted to the first space via the pressure transmission fluid is taken as the measurement pressure, and the pressure in the second space is taken as the reference pressure. A pressure detector characterized in that a pressure measurement signal from the pressure sensitive element is taken out of the case. (2) In the detector described in claim 1 of the utility model registration claim, the pressure receiving diaphragm is a thin film made of stainless steel, and a protective film made of an elastic material is provided on the outside of the thin film made of stainless steel. Features pressure detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17989784U JPS6194741U (en) | 1984-11-27 | 1984-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17989784U JPS6194741U (en) | 1984-11-27 | 1984-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6194741U true JPS6194741U (en) | 1986-06-18 |
Family
ID=30737461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17989784U Pending JPS6194741U (en) | 1984-11-27 | 1984-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6194741U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5062077A (en) * | 1973-10-01 | 1975-05-27 | ||
| JPS528878A (en) * | 1975-07-11 | 1977-01-24 | Hitachi Ltd | Semiconductor negative pressure sensor |
-
1984
- 1984-11-27 JP JP17989784U patent/JPS6194741U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5062077A (en) * | 1973-10-01 | 1975-05-27 | ||
| JPS528878A (en) * | 1975-07-11 | 1977-01-24 | Hitachi Ltd | Semiconductor negative pressure sensor |
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