JPS53121491A - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPS53121491A JPS53121491A JP3524577A JP3524577A JPS53121491A JP S53121491 A JPS53121491 A JP S53121491A JP 3524577 A JP3524577 A JP 3524577A JP 3524577 A JP3524577 A JP 3524577A JP S53121491 A JPS53121491 A JP S53121491A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- pressure sensor
- gauge resistor
- taking
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To obtain the pressure sensor of high sensitivity, by forming the gauge resistor of radial direction to an axis taking about 40° with (011) axis of the strain section of the (211) plane P type Si mono crystal substrate performing diaphragm operation, and the gauge resistor of tangential direction to the axis taking about 45° with the (011) axis, with the diffusion of N type impurity.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3524577A JPS53121491A (en) | 1977-03-31 | 1977-03-31 | Pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3524577A JPS53121491A (en) | 1977-03-31 | 1977-03-31 | Pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53121491A true JPS53121491A (en) | 1978-10-23 |
Family
ID=12436444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3524577A Pending JPS53121491A (en) | 1977-03-31 | 1977-03-31 | Pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53121491A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730922A (en) * | 1980-08-01 | 1982-02-19 | Hitachi Ltd | Sensor for pressure difference and pressure |
JPH0197827A (en) * | 1987-07-08 | 1989-04-17 | Ricoh Co Ltd | Semiconductor diffusion-type stress sensor |
-
1977
- 1977-03-31 JP JP3524577A patent/JPS53121491A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730922A (en) * | 1980-08-01 | 1982-02-19 | Hitachi Ltd | Sensor for pressure difference and pressure |
JPH0197827A (en) * | 1987-07-08 | 1989-04-17 | Ricoh Co Ltd | Semiconductor diffusion-type stress sensor |
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