JPS53121491A - Pressure sensor - Google Patents

Pressure sensor

Info

Publication number
JPS53121491A
JPS53121491A JP3524577A JP3524577A JPS53121491A JP S53121491 A JPS53121491 A JP S53121491A JP 3524577 A JP3524577 A JP 3524577A JP 3524577 A JP3524577 A JP 3524577A JP S53121491 A JPS53121491 A JP S53121491A
Authority
JP
Japan
Prior art keywords
axis
pressure sensor
gauge resistor
taking
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3524577A
Other languages
Japanese (ja)
Inventor
Yoshitaka Matsuoka
Mitsuo Ai
Satoshi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3524577A priority Critical patent/JPS53121491A/en
Publication of JPS53121491A publication Critical patent/JPS53121491A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To obtain the pressure sensor of high sensitivity, by forming the gauge resistor of radial direction to an axis taking about 40° with (011) axis of the strain section of the (211) plane P type Si mono crystal substrate performing diaphragm operation, and the gauge resistor of tangential direction to the axis taking about 45° with the (011) axis, with the diffusion of N type impurity.
COPYRIGHT: (C)1978,JPO&Japio
JP3524577A 1977-03-31 1977-03-31 Pressure sensor Pending JPS53121491A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3524577A JPS53121491A (en) 1977-03-31 1977-03-31 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3524577A JPS53121491A (en) 1977-03-31 1977-03-31 Pressure sensor

Publications (1)

Publication Number Publication Date
JPS53121491A true JPS53121491A (en) 1978-10-23

Family

ID=12436444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3524577A Pending JPS53121491A (en) 1977-03-31 1977-03-31 Pressure sensor

Country Status (1)

Country Link
JP (1) JPS53121491A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730922A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Sensor for pressure difference and pressure
JPH0197827A (en) * 1987-07-08 1989-04-17 Ricoh Co Ltd Semiconductor diffusion-type stress sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5730922A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Sensor for pressure difference and pressure
JPH0197827A (en) * 1987-07-08 1989-04-17 Ricoh Co Ltd Semiconductor diffusion-type stress sensor

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