JPS5374473A - Semiconductor pressure transducer - Google Patents
Semiconductor pressure transducerInfo
- Publication number
- JPS5374473A JPS5374473A JP15062576A JP15062576A JPS5374473A JP S5374473 A JPS5374473 A JP S5374473A JP 15062576 A JP15062576 A JP 15062576A JP 15062576 A JP15062576 A JP 15062576A JP S5374473 A JPS5374473 A JP S5374473A
- Authority
- JP
- Japan
- Prior art keywords
- pressure transducer
- semiconductor pressure
- stresses
- exerted
- sensitivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To make equal the stresses to be exerted upon the strain gauges formed on the same radius and eliminate the variation in sensitivity by changing the thickness of a circular diaphragm in correspondence to Young modulus in a radial direction.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15062576A JPS5374473A (en) | 1976-12-14 | 1976-12-14 | Semiconductor pressure transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15062576A JPS5374473A (en) | 1976-12-14 | 1976-12-14 | Semiconductor pressure transducer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5374473A true JPS5374473A (en) | 1978-07-01 |
Family
ID=15500941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15062576A Pending JPS5374473A (en) | 1976-12-14 | 1976-12-14 | Semiconductor pressure transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5374473A (en) |
-
1976
- 1976-12-14 JP JP15062576A patent/JPS5374473A/en active Pending
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