JPS5374473A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS5374473A
JPS5374473A JP15062576A JP15062576A JPS5374473A JP S5374473 A JPS5374473 A JP S5374473A JP 15062576 A JP15062576 A JP 15062576A JP 15062576 A JP15062576 A JP 15062576A JP S5374473 A JPS5374473 A JP S5374473A
Authority
JP
Japan
Prior art keywords
pressure transducer
semiconductor pressure
stresses
exerted
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15062576A
Other languages
Japanese (ja)
Inventor
Yukio Takahashi
Mitsuo Ai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15062576A priority Critical patent/JPS5374473A/en
Publication of JPS5374473A publication Critical patent/JPS5374473A/en
Pending legal-status Critical Current

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  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: To make equal the stresses to be exerted upon the strain gauges formed on the same radius and eliminate the variation in sensitivity by changing the thickness of a circular diaphragm in correspondence to Young modulus in a radial direction.
COPYRIGHT: (C)1978,JPO&Japio
JP15062576A 1976-12-14 1976-12-14 Semiconductor pressure transducer Pending JPS5374473A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15062576A JPS5374473A (en) 1976-12-14 1976-12-14 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15062576A JPS5374473A (en) 1976-12-14 1976-12-14 Semiconductor pressure transducer

Publications (1)

Publication Number Publication Date
JPS5374473A true JPS5374473A (en) 1978-07-01

Family

ID=15500941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15062576A Pending JPS5374473A (en) 1976-12-14 1976-12-14 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS5374473A (en)

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