JPS5322451A - Semiconductor type displacement transducer - Google Patents

Semiconductor type displacement transducer

Info

Publication number
JPS5322451A
JPS5322451A JP9598976A JP9598976A JPS5322451A JP S5322451 A JPS5322451 A JP S5322451A JP 9598976 A JP9598976 A JP 9598976A JP 9598976 A JP9598976 A JP 9598976A JP S5322451 A JPS5322451 A JP S5322451A
Authority
JP
Japan
Prior art keywords
displacement transducer
type displacement
semiconductor type
strain gauges
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9598976A
Other languages
Japanese (ja)
Inventor
Yasuo Kaminaga
Motohisa Nishihara
Yasumasa Matsuda
Kazuji Yamada
Satoshi Shimada
Masanori Tanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9598976A priority Critical patent/JPS5322451A/en
Publication of JPS5322451A publication Critical patent/JPS5322451A/en
Pending legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

PURPOSE: To improve the linearity of the outputs of strain gauges by always acting tension force on the semiconductor strain gauges in a system wherein the semiconductor strain gauges in a system wherein the semiconductor strain gauges are secured to the strain inducing part of a cantilever.
COPYRIGHT: (C)1978,JPO&Japio
JP9598976A 1976-08-13 1976-08-13 Semiconductor type displacement transducer Pending JPS5322451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9598976A JPS5322451A (en) 1976-08-13 1976-08-13 Semiconductor type displacement transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9598976A JPS5322451A (en) 1976-08-13 1976-08-13 Semiconductor type displacement transducer

Publications (1)

Publication Number Publication Date
JPS5322451A true JPS5322451A (en) 1978-03-01

Family

ID=14152531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9598976A Pending JPS5322451A (en) 1976-08-13 1976-08-13 Semiconductor type displacement transducer

Country Status (1)

Country Link
JP (1) JPS5322451A (en)

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