JPS52143786A - Semiconductor pressure, differential pressure transmitter - Google Patents

Semiconductor pressure, differential pressure transmitter

Info

Publication number
JPS52143786A
JPS52143786A JP6017776A JP6017776A JPS52143786A JP S52143786 A JPS52143786 A JP S52143786A JP 6017776 A JP6017776 A JP 6017776A JP 6017776 A JP6017776 A JP 6017776A JP S52143786 A JPS52143786 A JP S52143786A
Authority
JP
Japan
Prior art keywords
pressure
semiconductor
transmitter
differential pressure
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6017776A
Other languages
Japanese (ja)
Other versions
JPS6155789B2 (en
Inventor
Shunji Shiromizu
Shozo Sato
Susumu Kimijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6017776A priority Critical patent/JPS52143786A/en
Publication of JPS52143786A publication Critical patent/JPS52143786A/en
Publication of JPS6155789B2 publication Critical patent/JPS6155789B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To improve performance and stabilize characteristics over a long period of time by using a strain inducing plate composed of semiconductor at pressure transducer part.
COPYRIGHT: (C)1977,JPO&Japio
JP6017776A 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter Granted JPS52143786A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6017776A JPS52143786A (en) 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6017776A JPS52143786A (en) 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter

Publications (2)

Publication Number Publication Date
JPS52143786A true JPS52143786A (en) 1977-11-30
JPS6155789B2 JPS6155789B2 (en) 1986-11-29

Family

ID=13134602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6017776A Granted JPS52143786A (en) 1976-05-26 1976-05-26 Semiconductor pressure, differential pressure transmitter

Country Status (1)

Country Link
JP (1) JPS52143786A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687196A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter
JPS61181340U (en) * 1984-09-25 1986-11-12
JPS6318231A (en) * 1986-07-10 1988-01-26 Shimon Kk Semiconductor pressure sensor
JPH0393756U (en) * 1990-01-12 1991-09-25
JPH0489540A (en) * 1990-08-01 1992-03-23 Mitsubishi Electric Corp Semiconductor pressure sensor
JP2011503450A (en) * 2007-11-02 2011-01-27 インテグリス・インコーポレーテッド Integrated face seal

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5687196A (en) * 1979-12-19 1981-07-15 Hitachi Ltd Differential pressure transmitter
JPS61181340U (en) * 1984-09-25 1986-11-12
JPS6318231A (en) * 1986-07-10 1988-01-26 Shimon Kk Semiconductor pressure sensor
JPH0566979B2 (en) * 1986-07-10 1993-09-22 Alloy Koki Kk
JPH0393756U (en) * 1990-01-12 1991-09-25
JPH0489540A (en) * 1990-08-01 1992-03-23 Mitsubishi Electric Corp Semiconductor pressure sensor
JP2011503450A (en) * 2007-11-02 2011-01-27 インテグリス・インコーポレーテッド Integrated face seal

Also Published As

Publication number Publication date
JPS6155789B2 (en) 1986-11-29

Similar Documents

Publication Publication Date Title
JPS52143786A (en) Semiconductor pressure, differential pressure transmitter
JPS53137129A (en) Vibratory diaphragm for acousitic device
JPS53114688A (en) Diaphragm type strain gauge
JPS52134481A (en) Piezo-electric conversion device
JPS5251929A (en) Diaphragm for speakers
JPS5246252A (en) Diaphragm
JPS5341482A (en) Preparation of marine methanol-assimilable bacterial cells
JPS5379495A (en) Electroacoustic transducer
JPS52139456A (en) Pressure and pressure-difference transmitting apparatus
JPS5293855A (en) Diaphragm type coupling
JPS5214163A (en) Friction clutch
JPS5261483A (en) Semiconductor pressure transducer
JPS53119693A (en) Semiconductor pressure transducer
JPS5352687A (en) Preparation of choline-oxidase
JPS51128581A (en) Diaphragm type pressure element
JPS52134094A (en) Preparation of pseudo-oxynicotine
JPS53114689A (en) Semiconductor strain gauge type diaphragm
JPS51120687A (en) Semiconductor pressure converter
JPS5324152A (en) Water pressure response device
JPS5222972A (en) Semiconductor strain gauge type pressure sensor
JPS51150783A (en) Striking instrument by combustion pressure
JPS52104682A (en) Negative pressure reacting apparatus
JPS527687A (en) Manufucturing method of piezoelectric transformer
JPS537387A (en) Vibration type pressure converter
JPS51150453A (en) Boarder-shaving-edge driving structure