JPS52143786A - Semiconductor pressure, differential pressure transmitter - Google Patents
Semiconductor pressure, differential pressure transmitterInfo
- Publication number
- JPS52143786A JPS52143786A JP6017776A JP6017776A JPS52143786A JP S52143786 A JPS52143786 A JP S52143786A JP 6017776 A JP6017776 A JP 6017776A JP 6017776 A JP6017776 A JP 6017776A JP S52143786 A JPS52143786 A JP S52143786A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- semiconductor
- transmitter
- differential pressure
- differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To improve performance and stabilize characteristics over a long period of time by using a strain inducing plate composed of semiconductor at pressure transducer part.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6017776A JPS52143786A (en) | 1976-05-26 | 1976-05-26 | Semiconductor pressure, differential pressure transmitter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6017776A JPS52143786A (en) | 1976-05-26 | 1976-05-26 | Semiconductor pressure, differential pressure transmitter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52143786A true JPS52143786A (en) | 1977-11-30 |
JPS6155789B2 JPS6155789B2 (en) | 1986-11-29 |
Family
ID=13134602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6017776A Granted JPS52143786A (en) | 1976-05-26 | 1976-05-26 | Semiconductor pressure, differential pressure transmitter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52143786A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5687196A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Differential pressure transmitter |
JPS61181340U (en) * | 1984-09-25 | 1986-11-12 | ||
JPS6318231A (en) * | 1986-07-10 | 1988-01-26 | Shimon Kk | Semiconductor pressure sensor |
JPH0393756U (en) * | 1990-01-12 | 1991-09-25 | ||
JPH0489540A (en) * | 1990-08-01 | 1992-03-23 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
JP2011503450A (en) * | 2007-11-02 | 2011-01-27 | インテグリス・インコーポレーテッド | Integrated face seal |
-
1976
- 1976-05-26 JP JP6017776A patent/JPS52143786A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5687196A (en) * | 1979-12-19 | 1981-07-15 | Hitachi Ltd | Differential pressure transmitter |
JPS61181340U (en) * | 1984-09-25 | 1986-11-12 | ||
JPS6318231A (en) * | 1986-07-10 | 1988-01-26 | Shimon Kk | Semiconductor pressure sensor |
JPH0566979B2 (en) * | 1986-07-10 | 1993-09-22 | Alloy Koki Kk | |
JPH0393756U (en) * | 1990-01-12 | 1991-09-25 | ||
JPH0489540A (en) * | 1990-08-01 | 1992-03-23 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
JP2011503450A (en) * | 2007-11-02 | 2011-01-27 | インテグリス・インコーポレーテッド | Integrated face seal |
Also Published As
Publication number | Publication date |
---|---|
JPS6155789B2 (en) | 1986-11-29 |
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