JPS53119693A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS53119693A
JPS53119693A JP3482877A JP3482877A JPS53119693A JP S53119693 A JPS53119693 A JP S53119693A JP 3482877 A JP3482877 A JP 3482877A JP 3482877 A JP3482877 A JP 3482877A JP S53119693 A JPS53119693 A JP S53119693A
Authority
JP
Japan
Prior art keywords
pressure transducer
semiconductor pressure
bonding
encircle
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3482877A
Other languages
Japanese (ja)
Inventor
Shunji Shiromizu
Susumu Kimijima
Shozo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3482877A priority Critical patent/JPS53119693A/en
Publication of JPS53119693A publication Critical patent/JPS53119693A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To make a device of firm bonding to a fixing base and less temperature hysteresis by bonding, for example, SiO2 film on the bonding end face of a pressure transducing substrate in the state of leaving part thereof so as to encircle a diaphragm.
COPYRIGHT: (C)1978,JPO&Japio
JP3482877A 1977-03-29 1977-03-29 Semiconductor pressure transducer Pending JPS53119693A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3482877A JPS53119693A (en) 1977-03-29 1977-03-29 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3482877A JPS53119693A (en) 1977-03-29 1977-03-29 Semiconductor pressure transducer

Publications (1)

Publication Number Publication Date
JPS53119693A true JPS53119693A (en) 1978-10-19

Family

ID=12425050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3482877A Pending JPS53119693A (en) 1977-03-29 1977-03-29 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS53119693A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4929999A (en) * 1988-04-08 1990-05-29 U.S. Philips Corporation Combination of a support and a semiconductor body and method of manufacturing such a combination
US5721446A (en) * 1995-01-19 1998-02-24 Mitsubishi Denki Kabushiki Kaisha Semiconductor pressure sensor with spacing member disposed between sensor and substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4929999A (en) * 1988-04-08 1990-05-29 U.S. Philips Corporation Combination of a support and a semiconductor body and method of manufacturing such a combination
US5721446A (en) * 1995-01-19 1998-02-24 Mitsubishi Denki Kabushiki Kaisha Semiconductor pressure sensor with spacing member disposed between sensor and substrate

Similar Documents

Publication Publication Date Title
JPS53119693A (en) Semiconductor pressure transducer
JPS52143786A (en) Semiconductor pressure, differential pressure transmitter
JPS53128285A (en) Semiconductor device and production of the same
JPS53119694A (en) Semiconductor pressure transducer
JPS52112640A (en) Pressure-sensitive adhesive tape or sheet
JPS54974A (en) Manufacture for semiconductor device
JPS5261483A (en) Semiconductor pressure transducer
JPS5354990A (en) Pressure sensitive device
JPS543473A (en) Manufacture of semiconductor device
JPS5317068A (en) Semiconductor device and its production
JPS5413783A (en) Photoelectric transducer
JPS52139456A (en) Pressure and pressure-difference transmitting apparatus
JPS5325356A (en) Wire bonding device
JPS5260581A (en) Semiconductor device
JPS5330274A (en) Semiconductor device
JPS52119067A (en) Semiconductor device
JPS5315759A (en) Electronic parts
JPS53138280A (en) Manufacture of semiconductor device
JPS5344171A (en) Semiconductor device
JPS52107858A (en) Displacement converter
JPS5380160A (en) Manufacture of substrate for semiconductor device
JPS542658A (en) Semiconductor device and its manufacture
JPS5210184A (en) Temperature pressure detecting device
JPS53132982A (en) Semiconductor pressure transducer
JPS5313884A (en) Piezoelectric transducer