JPS542658A - Semiconductor device and its manufacture - Google Patents

Semiconductor device and its manufacture

Info

Publication number
JPS542658A
JPS542658A JP6725377A JP6725377A JPS542658A JP S542658 A JPS542658 A JP S542658A JP 6725377 A JP6725377 A JP 6725377A JP 6725377 A JP6725377 A JP 6725377A JP S542658 A JPS542658 A JP S542658A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
epi
forming
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6725377A
Other languages
Japanese (ja)
Other versions
JPS5931984B2 (en
Inventor
Akira Osawa
Masaru Ihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6725377A priority Critical patent/JPS5931984B2/en
Publication of JPS542658A publication Critical patent/JPS542658A/en
Publication of JPS5931984B2 publication Critical patent/JPS5931984B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To eliminate curvature by epi-forming single-crystal sapphires on both the top and reverse surfaces of a Si substrate and by forming an element on the semiconductor active layer epi-formed on one surface.
COPYRIGHT: (C)1979,JPO&Japio
JP6725377A 1977-06-09 1977-06-09 Semiconductor device and its manufacturing method Expired JPS5931984B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6725377A JPS5931984B2 (en) 1977-06-09 1977-06-09 Semiconductor device and its manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6725377A JPS5931984B2 (en) 1977-06-09 1977-06-09 Semiconductor device and its manufacturing method

Publications (2)

Publication Number Publication Date
JPS542658A true JPS542658A (en) 1979-01-10
JPS5931984B2 JPS5931984B2 (en) 1984-08-06

Family

ID=13339577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6725377A Expired JPS5931984B2 (en) 1977-06-09 1977-06-09 Semiconductor device and its manufacturing method

Country Status (1)

Country Link
JP (1) JPS5931984B2 (en)

Also Published As

Publication number Publication date
JPS5931984B2 (en) 1984-08-06

Similar Documents

Publication Publication Date Title
JPS53104156A (en) Manufacture for semiconductor device
JPS53108389A (en) Manufacture for semiconductor device
JPS53128285A (en) Semiconductor device and production of the same
JPS542658A (en) Semiconductor device and its manufacture
JPS53104162A (en) Forming method for epitaxial layer on semiconductor wafer
JPS53139476A (en) Manufacture of semiconductor device
JPS542657A (en) Manufacture for semiconductor device
JPS5381069A (en) Production of susceptor in cvd device
JPS534469A (en) Semiconductor device
JPS5417669A (en) Semiconductor device
JPS5245270A (en) Semiconductor device
JPS5368165A (en) Production of semiconductor device
JPS5389656A (en) Production of semiconductor device
JPS547867A (en) Manufacture for semiconductor device
JPS52141566A (en) Semiconductor device and its manufacture
JPS547868A (en) Manufacture for beam lead type semiconductor device
JPS53116073A (en) Semiconductor device
JPS5317286A (en) Production of semiconductor device
JPS5336180A (en) Production of semiconductor device
JPS5380160A (en) Manufacture of substrate for semiconductor device
JPS53138280A (en) Manufacture of semiconductor device
JPS5396761A (en) Production of semiconductor device
JPS5421182A (en) Manufacture for semiconductor device
JPS52109368A (en) Semiconductor device
JPS5380976A (en) Semiconductor device