JPS51120355A - Process for making diaphragm by photoetching - Google Patents
Process for making diaphragm by photoetchingInfo
- Publication number
- JPS51120355A JPS51120355A JP4546575A JP4546575A JPS51120355A JP S51120355 A JPS51120355 A JP S51120355A JP 4546575 A JP4546575 A JP 4546575A JP 4546575 A JP4546575 A JP 4546575A JP S51120355 A JPS51120355 A JP S51120355A
- Authority
- JP
- Japan
- Prior art keywords
- photoetching
- diaphragm
- making diaphragm
- making
- variety
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Diaphragms And Bellows (AREA)
Abstract
PURPOSE: Process for making diaphragm by photoetching in which a wide variety of selection of material used for diaphragm may be provided compared with that of the conventional limited material of diaphragm and further a variety of pressure transducers may be provided.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4546575A JPS51120355A (en) | 1975-04-15 | 1975-04-15 | Process for making diaphragm by photoetching |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4546575A JPS51120355A (en) | 1975-04-15 | 1975-04-15 | Process for making diaphragm by photoetching |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51120355A true JPS51120355A (en) | 1976-10-21 |
Family
ID=12720109
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4546575A Pending JPS51120355A (en) | 1975-04-15 | 1975-04-15 | Process for making diaphragm by photoetching |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51120355A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541754A (en) * | 1977-06-07 | 1979-01-08 | Matsushita Electric Ind Co Ltd | Diaphragm for pressure convertor and its preparation |
DE4238571C1 (en) * | 1992-11-16 | 1994-06-01 | Kernforschungsz Karlsruhe | Process for the production of membranes spanned by a frame |
-
1975
- 1975-04-15 JP JP4546575A patent/JPS51120355A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541754A (en) * | 1977-06-07 | 1979-01-08 | Matsushita Electric Ind Co Ltd | Diaphragm for pressure convertor and its preparation |
DE4238571C1 (en) * | 1992-11-16 | 1994-06-01 | Kernforschungsz Karlsruhe | Process for the production of membranes spanned by a frame |
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