JPS52149992A - Pressure transducer - Google Patents
Pressure transducerInfo
- Publication number
- JPS52149992A JPS52149992A JP6660376A JP6660376A JPS52149992A JP S52149992 A JPS52149992 A JP S52149992A JP 6660376 A JP6660376 A JP 6660376A JP 6660376 A JP6660376 A JP 6660376A JP S52149992 A JPS52149992 A JP S52149992A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- pressure transducer
- substrate
- semiconductor
- accommodt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To obtain sufficient airtightness by interposing a Cr layer, a Cu layer which blocks the diffusion of Au into said layer and an Au layer between a semiconductor diaphragm formed with a semiconductor strain gauge and a metal pipe which secures said substrate and a metal housing which accommodt dates said substrate.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6660376A JPS52149992A (en) | 1976-06-09 | 1976-06-09 | Pressure transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6660376A JPS52149992A (en) | 1976-06-09 | 1976-06-09 | Pressure transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52149992A true JPS52149992A (en) | 1977-12-13 |
JPS575298B2 JPS575298B2 (en) | 1982-01-29 |
Family
ID=13320642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6660376A Granted JPS52149992A (en) | 1976-06-09 | 1976-06-09 | Pressure transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52149992A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5598323A (en) * | 1978-12-22 | 1980-07-26 | United Technologies Corp | Vacuummsealed structure for saw pressure sensor |
JPS58142289A (en) * | 1982-02-19 | 1983-08-24 | Toshiba Corp | Time piece with sensor |
-
1976
- 1976-06-09 JP JP6660376A patent/JPS52149992A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5598323A (en) * | 1978-12-22 | 1980-07-26 | United Technologies Corp | Vacuummsealed structure for saw pressure sensor |
JPS6345049B2 (en) * | 1978-12-22 | 1988-09-07 | Yunaitetsudo Tekunorojiizu Corp | |
JPS58142289A (en) * | 1982-02-19 | 1983-08-24 | Toshiba Corp | Time piece with sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS575298B2 (en) | 1982-01-29 |
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