JPS52116184A - Semiconductor type displacement/conversion unit and its manufacture - Google Patents

Semiconductor type displacement/conversion unit and its manufacture

Info

Publication number
JPS52116184A
JPS52116184A JP3263076A JP3263076A JPS52116184A JP S52116184 A JPS52116184 A JP S52116184A JP 3263076 A JP3263076 A JP 3263076A JP 3263076 A JP3263076 A JP 3263076A JP S52116184 A JPS52116184 A JP S52116184A
Authority
JP
Japan
Prior art keywords
manufacture
conversion unit
type displacement
semiconductor type
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3263076A
Other languages
Japanese (ja)
Inventor
Yasutoshi Kurihara
Teruyuki Kagami
Tetsuo Kosugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3263076A priority Critical patent/JPS52116184A/en
Publication of JPS52116184A publication Critical patent/JPS52116184A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The insulating material and semiconductor material are formed through lamination to one main surface of semiconductor single crystal on the other main surface of which the distortion response region is formed, and this surface is adhered to distortion measuring material coated by metal film. As a result, the distortion which remains after adhesion is eliminated to obtain linear output.
COPYRIGHT: (C)1977,JPO&Japio
JP3263076A 1976-03-26 1976-03-26 Semiconductor type displacement/conversion unit and its manufacture Pending JPS52116184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3263076A JPS52116184A (en) 1976-03-26 1976-03-26 Semiconductor type displacement/conversion unit and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3263076A JPS52116184A (en) 1976-03-26 1976-03-26 Semiconductor type displacement/conversion unit and its manufacture

Publications (1)

Publication Number Publication Date
JPS52116184A true JPS52116184A (en) 1977-09-29

Family

ID=12364159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3263076A Pending JPS52116184A (en) 1976-03-26 1976-03-26 Semiconductor type displacement/conversion unit and its manufacture

Country Status (1)

Country Link
JP (1) JPS52116184A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102884A (en) * 1978-01-30 1979-08-13 Hitachi Ltd Semiconductor displacement coverter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54102884A (en) * 1978-01-30 1979-08-13 Hitachi Ltd Semiconductor displacement coverter
JPS6222469B2 (en) * 1978-01-30 1987-05-18 Hitachi Ltd

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