JPS51127680A - Manufacturing process of semiconductor device - Google Patents

Manufacturing process of semiconductor device

Info

Publication number
JPS51127680A
JPS51127680A JP5080375A JP5080375A JPS51127680A JP S51127680 A JPS51127680 A JP S51127680A JP 5080375 A JP5080375 A JP 5080375A JP 5080375 A JP5080375 A JP 5080375A JP S51127680 A JPS51127680 A JP S51127680A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing process
glass
resist
phosphor glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5080375A
Other languages
Japanese (ja)
Inventor
Atsushi Iwamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5080375A priority Critical patent/JPS51127680A/en
Publication of JPS51127680A publication Critical patent/JPS51127680A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve adhesion property of phosphor glass to the resist by providing a special structure in which the phospher glass and the resist coat are not directly touching. This is possible by coating a thin low-temperature oxidized film of a fixed thickness on a high density phosphor glass.
COPYRIGHT: (C)1976,JPO&Japio
JP5080375A 1975-04-28 1975-04-28 Manufacturing process of semiconductor device Pending JPS51127680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5080375A JPS51127680A (en) 1975-04-28 1975-04-28 Manufacturing process of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5080375A JPS51127680A (en) 1975-04-28 1975-04-28 Manufacturing process of semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP27069984A Division JPS60167357A (en) 1984-12-24 1984-12-24 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS51127680A true JPS51127680A (en) 1976-11-06

Family

ID=12868925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5080375A Pending JPS51127680A (en) 1975-04-28 1975-04-28 Manufacturing process of semiconductor device

Country Status (1)

Country Link
JP (1) JPS51127680A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5299085A (en) * 1976-02-16 1977-08-19 Mitsubishi Electric Corp Production of semiconductor device
JPS5582436A (en) * 1978-12-15 1980-06-21 Nippon Denso Co Ltd Manufacture of semiconductor device
JPS5750431A (en) * 1980-09-10 1982-03-24 Toshiba Corp Forming method for minute pattern
JPS57113229A (en) * 1980-12-29 1982-07-14 Fujitsu Ltd Forming method for insulating film
JPS57120351A (en) * 1981-01-19 1982-07-27 Matsushita Electronics Corp Manufacture of semiconductor device
JPS59222945A (en) * 1983-06-02 1984-12-14 Matsushita Electronics Corp Manufacture of semiconductor device
JPS60198847A (en) * 1984-03-23 1985-10-08 Nec Corp Semiconductor device and manufacture thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494994A (en) * 1972-04-27 1974-01-17
JPS506143A (en) * 1973-05-21 1975-01-22
JPS509343A (en) * 1973-05-23 1975-01-30

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494994A (en) * 1972-04-27 1974-01-17
JPS506143A (en) * 1973-05-21 1975-01-22
JPS509343A (en) * 1973-05-23 1975-01-30

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5299085A (en) * 1976-02-16 1977-08-19 Mitsubishi Electric Corp Production of semiconductor device
JPS5582436A (en) * 1978-12-15 1980-06-21 Nippon Denso Co Ltd Manufacture of semiconductor device
JPS5750431A (en) * 1980-09-10 1982-03-24 Toshiba Corp Forming method for minute pattern
JPS57113229A (en) * 1980-12-29 1982-07-14 Fujitsu Ltd Forming method for insulating film
JPS57120351A (en) * 1981-01-19 1982-07-27 Matsushita Electronics Corp Manufacture of semiconductor device
JPS59222945A (en) * 1983-06-02 1984-12-14 Matsushita Electronics Corp Manufacture of semiconductor device
JPS60198847A (en) * 1984-03-23 1985-10-08 Nec Corp Semiconductor device and manufacture thereof

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