JPS51127680A - Manufacturing process of semiconductor device - Google Patents
Manufacturing process of semiconductor deviceInfo
- Publication number
- JPS51127680A JPS51127680A JP5080375A JP5080375A JPS51127680A JP S51127680 A JPS51127680 A JP S51127680A JP 5080375 A JP5080375 A JP 5080375A JP 5080375 A JP5080375 A JP 5080375A JP S51127680 A JPS51127680 A JP S51127680A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing process
- glass
- resist
- phosphor glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve adhesion property of phosphor glass to the resist by providing a special structure in which the phospher glass and the resist coat are not directly touching. This is possible by coating a thin low-temperature oxidized film of a fixed thickness on a high density phosphor glass.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5080375A JPS51127680A (en) | 1975-04-28 | 1975-04-28 | Manufacturing process of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5080375A JPS51127680A (en) | 1975-04-28 | 1975-04-28 | Manufacturing process of semiconductor device |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27069984A Division JPS60167357A (en) | 1984-12-24 | 1984-12-24 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51127680A true JPS51127680A (en) | 1976-11-06 |
Family
ID=12868925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5080375A Pending JPS51127680A (en) | 1975-04-28 | 1975-04-28 | Manufacturing process of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51127680A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5299085A (en) * | 1976-02-16 | 1977-08-19 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS5582436A (en) * | 1978-12-15 | 1980-06-21 | Nippon Denso Co Ltd | Manufacture of semiconductor device |
JPS5750431A (en) * | 1980-09-10 | 1982-03-24 | Toshiba Corp | Forming method for minute pattern |
JPS57113229A (en) * | 1980-12-29 | 1982-07-14 | Fujitsu Ltd | Forming method for insulating film |
JPS57120351A (en) * | 1981-01-19 | 1982-07-27 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS59222945A (en) * | 1983-06-02 | 1984-12-14 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS60198847A (en) * | 1984-03-23 | 1985-10-08 | Nec Corp | Semiconductor device and manufacture thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494994A (en) * | 1972-04-27 | 1974-01-17 | ||
JPS506143A (en) * | 1973-05-21 | 1975-01-22 | ||
JPS509343A (en) * | 1973-05-23 | 1975-01-30 |
-
1975
- 1975-04-28 JP JP5080375A patent/JPS51127680A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS494994A (en) * | 1972-04-27 | 1974-01-17 | ||
JPS506143A (en) * | 1973-05-21 | 1975-01-22 | ||
JPS509343A (en) * | 1973-05-23 | 1975-01-30 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5299085A (en) * | 1976-02-16 | 1977-08-19 | Mitsubishi Electric Corp | Production of semiconductor device |
JPS5582436A (en) * | 1978-12-15 | 1980-06-21 | Nippon Denso Co Ltd | Manufacture of semiconductor device |
JPS5750431A (en) * | 1980-09-10 | 1982-03-24 | Toshiba Corp | Forming method for minute pattern |
JPS57113229A (en) * | 1980-12-29 | 1982-07-14 | Fujitsu Ltd | Forming method for insulating film |
JPS57120351A (en) * | 1981-01-19 | 1982-07-27 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS59222945A (en) * | 1983-06-02 | 1984-12-14 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPS60198847A (en) * | 1984-03-23 | 1985-10-08 | Nec Corp | Semiconductor device and manufacture thereof |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS51147171A (en) | Flat surface multilayer cathode | |
JPS51127680A (en) | Manufacturing process of semiconductor device | |
JPS5331964A (en) | Production of semiconductor substrates | |
JPS53120527A (en) | Forming method of positive type radiation sensitive material layer | |
JPS51126384A (en) | A method of forming a thin film by sputtering | |
JPS529371A (en) | Fluorescent display tube manufactruing process | |
JPS5379469A (en) | Manufacture of glass mold type semiconductor rectifying device | |
JPS5267271A (en) | Formation of through-hole onto semiconductor substrate | |
JPS5260070A (en) | Production of semiconductor device | |
JPS5264890A (en) | Production of semiconductor device | |
JPS5222483A (en) | Method of manufacturing semiconductor device | |
JPS5376752A (en) | Production of semionductor device | |
JPS51147324A (en) | Solvent for electronic wire resist | |
JPS53114674A (en) | Manufacture for compound semiconductor device | |
JPS51112277A (en) | Semiconductor device and its production method | |
JPS52119204A (en) | Magnetic disc production | |
JPS533168A (en) | Semiconductor evaporating apparatus | |
JPS5380973A (en) | Manufacture of mask | |
JPS53120529A (en) | Forming method of positive type radiation sensitive material layer | |
JPS5341186A (en) | Manufacture of semiconductor device | |
JPS5351978A (en) | Manufacture of semiconductor device | |
JPS5379460A (en) | Manufacture of semiconductor device | |
JPS5378168A (en) | Manufacture of semiconductor device | |
JPS5349946A (en) | Formation of swelled electrode | |
JPS53148968A (en) | Manufacture of semiconductor device |