JPS51126384A - A method of forming a thin film by sputtering - Google Patents

A method of forming a thin film by sputtering

Info

Publication number
JPS51126384A
JPS51126384A JP50051756A JP5175675A JPS51126384A JP S51126384 A JPS51126384 A JP S51126384A JP 50051756 A JP50051756 A JP 50051756A JP 5175675 A JP5175675 A JP 5175675A JP S51126384 A JPS51126384 A JP S51126384A
Authority
JP
Japan
Prior art keywords
sputtering
thin film
forming
potical
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50051756A
Other languages
Japanese (ja)
Other versions
JPS5515550B2 (en
Inventor
Yoshihiro Ehata
Ryozo Hayamizu
Yasuo Hihashi
Minoru Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50051756A priority Critical patent/JPS51126384A/en
Publication of JPS51126384A publication Critical patent/JPS51126384A/en
Publication of JPS5515550B2 publication Critical patent/JPS5515550B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)

Abstract

PURPOSE: A thin film having superior electrical, mechanical and potical characteristics and particularly high adhesion to substrates is formed by sputtering of silicon oxide or aluminum oxide.
COPYRIGHT: (C)1976,JPO&Japio
JP50051756A 1975-04-28 1975-04-28 A method of forming a thin film by sputtering Granted JPS51126384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50051756A JPS51126384A (en) 1975-04-28 1975-04-28 A method of forming a thin film by sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50051756A JPS51126384A (en) 1975-04-28 1975-04-28 A method of forming a thin film by sputtering

Publications (2)

Publication Number Publication Date
JPS51126384A true JPS51126384A (en) 1976-11-04
JPS5515550B2 JPS5515550B2 (en) 1980-04-24

Family

ID=12895770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50051756A Granted JPS51126384A (en) 1975-04-28 1975-04-28 A method of forming a thin film by sputtering

Country Status (1)

Country Link
JP (1) JPS51126384A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137919A (en) * 1980-03-31 1981-10-28 Toyoda Gosei Co Ltd Molding in synthetic resin having hairline pattern
JPS61132902A (en) * 1984-11-30 1986-06-20 Osaka Tokushu Gokin Kk Transparent film for blocking ultraviolet ray and infrared ray
JPS63206462A (en) * 1987-02-24 1988-08-25 Kawatetsu Kogyo Kk Production of thin conductive or superconductive film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031567Y2 (en) * 1982-11-30 1985-09-20 丈児 小原 Hooks for hanging items

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832733A (en) * 1971-09-01 1973-05-02
JPS51107289A (en) * 1975-03-18 1976-09-22 Kogyo Gijutsuin Hishotai oyobi ketsushotaikitaihyomenno kodokairyoho
JPS51115289A (en) * 1975-02-22 1976-10-09 Agency Of Ind Science & Technol Case-hardening a single crystal

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4832733A (en) * 1971-09-01 1973-05-02
JPS51115289A (en) * 1975-02-22 1976-10-09 Agency Of Ind Science & Technol Case-hardening a single crystal
JPS51107289A (en) * 1975-03-18 1976-09-22 Kogyo Gijutsuin Hishotai oyobi ketsushotaikitaihyomenno kodokairyoho

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56137919A (en) * 1980-03-31 1981-10-28 Toyoda Gosei Co Ltd Molding in synthetic resin having hairline pattern
JPS6058695B2 (en) * 1980-03-31 1985-12-21 豊田合成株式会社 Synthetic resin molded product with hairline pattern
JPS61132902A (en) * 1984-11-30 1986-06-20 Osaka Tokushu Gokin Kk Transparent film for blocking ultraviolet ray and infrared ray
JPH0444721B2 (en) * 1984-11-30 1992-07-22 Oosaka Tokushu Gokin Kk
JPS63206462A (en) * 1987-02-24 1988-08-25 Kawatetsu Kogyo Kk Production of thin conductive or superconductive film

Also Published As

Publication number Publication date
JPS5515550B2 (en) 1980-04-24

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