JPS54101661A - Ingot for single crystal substrate - Google Patents

Ingot for single crystal substrate

Info

Publication number
JPS54101661A
JPS54101661A JP809778A JP809778A JPS54101661A JP S54101661 A JPS54101661 A JP S54101661A JP 809778 A JP809778 A JP 809778A JP 809778 A JP809778 A JP 809778A JP S54101661 A JPS54101661 A JP S54101661A
Authority
JP
Japan
Prior art keywords
ingot
single crystal
crystal substrate
main body
metal film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP809778A
Other languages
Japanese (ja)
Inventor
Kenzo Ashiuchi
Takuji Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP809778A priority Critical patent/JPS54101661A/en
Publication of JPS54101661A publication Critical patent/JPS54101661A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the generation factor of crack after slicing, by coating the outside circumference of an ingot main body with a soft metal film in the ingot for single crystal substrates used as the substrate of semiconductor elements.
CONSTITUTION: Soft metal film 10 consisting of, for example, Al is caused to adhere to the outside circumference of ingot main body 9 by evaporation, etc.
COPYRIGHT: (C)1979,JPO&Japio
JP809778A 1978-01-27 1978-01-27 Ingot for single crystal substrate Pending JPS54101661A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP809778A JPS54101661A (en) 1978-01-27 1978-01-27 Ingot for single crystal substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP809778A JPS54101661A (en) 1978-01-27 1978-01-27 Ingot for single crystal substrate

Publications (1)

Publication Number Publication Date
JPS54101661A true JPS54101661A (en) 1979-08-10

Family

ID=11683799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP809778A Pending JPS54101661A (en) 1978-01-27 1978-01-27 Ingot for single crystal substrate

Country Status (1)

Country Link
JP (1) JPS54101661A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698817A (en) * 1980-01-09 1981-08-08 Oki Electric Ind Co Ltd Semiconductor substrate and its preparation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698817A (en) * 1980-01-09 1981-08-08 Oki Electric Ind Co Ltd Semiconductor substrate and its preparation
JPS634342B2 (en) * 1980-01-09 1988-01-28 Oki Electric Ind Co Ltd

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