JPS54101661A - Ingot for single crystal substrate - Google Patents
Ingot for single crystal substrateInfo
- Publication number
- JPS54101661A JPS54101661A JP809778A JP809778A JPS54101661A JP S54101661 A JPS54101661 A JP S54101661A JP 809778 A JP809778 A JP 809778A JP 809778 A JP809778 A JP 809778A JP S54101661 A JPS54101661 A JP S54101661A
- Authority
- JP
- Japan
- Prior art keywords
- ingot
- single crystal
- crystal substrate
- main body
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the generation factor of crack after slicing, by coating the outside circumference of an ingot main body with a soft metal film in the ingot for single crystal substrates used as the substrate of semiconductor elements.
CONSTITUTION: Soft metal film 10 consisting of, for example, Al is caused to adhere to the outside circumference of ingot main body 9 by evaporation, etc.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP809778A JPS54101661A (en) | 1978-01-27 | 1978-01-27 | Ingot for single crystal substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP809778A JPS54101661A (en) | 1978-01-27 | 1978-01-27 | Ingot for single crystal substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54101661A true JPS54101661A (en) | 1979-08-10 |
Family
ID=11683799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP809778A Pending JPS54101661A (en) | 1978-01-27 | 1978-01-27 | Ingot for single crystal substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54101661A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5698817A (en) * | 1980-01-09 | 1981-08-08 | Oki Electric Ind Co Ltd | Semiconductor substrate and its preparation |
-
1978
- 1978-01-27 JP JP809778A patent/JPS54101661A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5698817A (en) * | 1980-01-09 | 1981-08-08 | Oki Electric Ind Co Ltd | Semiconductor substrate and its preparation |
JPS634342B2 (en) * | 1980-01-09 | 1988-01-28 | Oki Electric Ind Co Ltd |
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