JPS53124460A - Vapor deposition method of orientation film for liquid crystal display elements - Google Patents

Vapor deposition method of orientation film for liquid crystal display elements

Info

Publication number
JPS53124460A
JPS53124460A JP3853577A JP3853577A JPS53124460A JP S53124460 A JPS53124460 A JP S53124460A JP 3853577 A JP3853577 A JP 3853577A JP 3853577 A JP3853577 A JP 3853577A JP S53124460 A JPS53124460 A JP S53124460A
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal display
vapor deposition
deposition method
display elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3853577A
Other languages
Japanese (ja)
Inventor
Sadayasu Horikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3853577A priority Critical patent/JPS53124460A/en
Publication of JPS53124460A publication Critical patent/JPS53124460A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Liquid Crystal (AREA)

Abstract

PURPOSE: To improve the resultant orientation characteristic by controlling the pressure in a vacuum vessel within a specific range at the time of performing diagonal vacuum deposition of SiO, etc. onto insulation substrates.
COPYRIGHT: (C)1978,JPO&Japio
JP3853577A 1977-04-06 1977-04-06 Vapor deposition method of orientation film for liquid crystal display elements Pending JPS53124460A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3853577A JPS53124460A (en) 1977-04-06 1977-04-06 Vapor deposition method of orientation film for liquid crystal display elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3853577A JPS53124460A (en) 1977-04-06 1977-04-06 Vapor deposition method of orientation film for liquid crystal display elements

Publications (1)

Publication Number Publication Date
JPS53124460A true JPS53124460A (en) 1978-10-30

Family

ID=12527964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3853577A Pending JPS53124460A (en) 1977-04-06 1977-04-06 Vapor deposition method of orientation film for liquid crystal display elements

Country Status (1)

Country Link
JP (1) JPS53124460A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014218705A (en) * 2013-05-09 2014-11-20 日本放送協会 Vacuum suction method, vacuum treatment unit, and sublimation pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014218705A (en) * 2013-05-09 2014-11-20 日本放送協会 Vacuum suction method, vacuum treatment unit, and sublimation pump

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