JPS5380973A - Manufacture of mask - Google Patents

Manufacture of mask

Info

Publication number
JPS5380973A
JPS5380973A JP15644676A JP15644676A JPS5380973A JP S5380973 A JPS5380973 A JP S5380973A JP 15644676 A JP15644676 A JP 15644676A JP 15644676 A JP15644676 A JP 15644676A JP S5380973 A JPS5380973 A JP S5380973A
Authority
JP
Japan
Prior art keywords
mask
manufacture
produce
thin film
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15644676A
Other languages
Japanese (ja)
Other versions
JPS5942973B2 (en
Inventor
Toshikiyo Ishiyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP51156446A priority Critical patent/JPS5942973B2/en
Publication of JPS5380973A publication Critical patent/JPS5380973A/en
Publication of JPS5942973B2 publication Critical patent/JPS5942973B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE: To produce a mask with only the metal thin film and without the glass substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP51156446A 1976-12-27 1976-12-27 How to make a mask Expired JPS5942973B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51156446A JPS5942973B2 (en) 1976-12-27 1976-12-27 How to make a mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51156446A JPS5942973B2 (en) 1976-12-27 1976-12-27 How to make a mask

Publications (2)

Publication Number Publication Date
JPS5380973A true JPS5380973A (en) 1978-07-17
JPS5942973B2 JPS5942973B2 (en) 1984-10-18

Family

ID=15627916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51156446A Expired JPS5942973B2 (en) 1976-12-27 1976-12-27 How to make a mask

Country Status (1)

Country Link
JP (1) JPS5942973B2 (en)

Also Published As

Publication number Publication date
JPS5942973B2 (en) 1984-10-18

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