JPS5533025A - Pressure-to-electricity converter - Google Patents

Pressure-to-electricity converter

Info

Publication number
JPS5533025A
JPS5533025A JP10477778A JP10477778A JPS5533025A JP S5533025 A JPS5533025 A JP S5533025A JP 10477778 A JP10477778 A JP 10477778A JP 10477778 A JP10477778 A JP 10477778A JP S5533025 A JPS5533025 A JP S5533025A
Authority
JP
Japan
Prior art keywords
diaphragm member
thin plate
silicon crystal
support members
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10477778A
Other languages
Japanese (ja)
Other versions
JPS6222467B2 (en
Inventor
Shoichi Kakimoto
Josuke Nakada
Toru Kameda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10477778A priority Critical patent/JPS5533025A/en
Publication of JPS5533025A publication Critical patent/JPS5533025A/en
Publication of JPS6222467B2 publication Critical patent/JPS6222467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To improve the characteristics of a pressure-to-electricity converter, by preparing a diaphragm member which is a thin plate of silicon crystal and has strain gauge parts in prescribed positions, preparing support members which are made of silicon crystal separately from the diaphragm member and support it, and coupling these members with one another by a bonding agent.
CONSTITUTION: The strain gauge parts 12 are produced by diffusion in the thin plate 11, which is made of silicon crystal and serves as the diaphragm member. The bottom of the thin plate 11 is etched to a prescribed thickness. The support members 13' made of silicon crystal are bonded to both the ends of the thin plate 11 by gold which is made into a eutectic AuSi alloy. The bottoms of the support members 13' are fixed on a mount 21 having a through hole 22. Since the diaphragm member and the support members are separately prepared, the diaphragm member can be etched to a uniform thickness. This results in reducing the scatter in the characteristics.
COPYRIGHT: (C)1980,JPO&Japio
JP10477778A 1978-08-28 1978-08-28 Pressure-to-electricity converter Granted JPS5533025A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10477778A JPS5533025A (en) 1978-08-28 1978-08-28 Pressure-to-electricity converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10477778A JPS5533025A (en) 1978-08-28 1978-08-28 Pressure-to-electricity converter

Publications (2)

Publication Number Publication Date
JPS5533025A true JPS5533025A (en) 1980-03-08
JPS6222467B2 JPS6222467B2 (en) 1987-05-18

Family

ID=14389900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10477778A Granted JPS5533025A (en) 1978-08-28 1978-08-28 Pressure-to-electricity converter

Country Status (1)

Country Link
JP (1) JPS5533025A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2832894B2 (en) * 1988-07-26 1998-12-09 日立建機株式会社 Pressure sensor, method of manufacturing the same, and hydraulic equipment including pressure sensor
JP2010538254A (en) * 2007-08-27 2010-12-09 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Pressure sensor, sensor probe with pressure sensor, medical device with sensor probe, and method of manufacturing sensor probe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2832894B2 (en) * 1988-07-26 1998-12-09 日立建機株式会社 Pressure sensor, method of manufacturing the same, and hydraulic equipment including pressure sensor
JP2010538254A (en) * 2007-08-27 2010-12-09 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ Pressure sensor, sensor probe with pressure sensor, medical device with sensor probe, and method of manufacturing sensor probe

Also Published As

Publication number Publication date
JPS6222467B2 (en) 1987-05-18

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