JPS5533025A - Pressure-to-electricity converter - Google Patents
Pressure-to-electricity converterInfo
- Publication number
- JPS5533025A JPS5533025A JP10477778A JP10477778A JPS5533025A JP S5533025 A JPS5533025 A JP S5533025A JP 10477778 A JP10477778 A JP 10477778A JP 10477778 A JP10477778 A JP 10477778A JP S5533025 A JPS5533025 A JP S5533025A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm member
- thin plate
- silicon crystal
- support members
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To improve the characteristics of a pressure-to-electricity converter, by preparing a diaphragm member which is a thin plate of silicon crystal and has strain gauge parts in prescribed positions, preparing support members which are made of silicon crystal separately from the diaphragm member and support it, and coupling these members with one another by a bonding agent.
CONSTITUTION: The strain gauge parts 12 are produced by diffusion in the thin plate 11, which is made of silicon crystal and serves as the diaphragm member. The bottom of the thin plate 11 is etched to a prescribed thickness. The support members 13' made of silicon crystal are bonded to both the ends of the thin plate 11 by gold which is made into a eutectic AuSi alloy. The bottoms of the support members 13' are fixed on a mount 21 having a through hole 22. Since the diaphragm member and the support members are separately prepared, the diaphragm member can be etched to a uniform thickness. This results in reducing the scatter in the characteristics.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10477778A JPS5533025A (en) | 1978-08-28 | 1978-08-28 | Pressure-to-electricity converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10477778A JPS5533025A (en) | 1978-08-28 | 1978-08-28 | Pressure-to-electricity converter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5533025A true JPS5533025A (en) | 1980-03-08 |
JPS6222467B2 JPS6222467B2 (en) | 1987-05-18 |
Family
ID=14389900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10477778A Granted JPS5533025A (en) | 1978-08-28 | 1978-08-28 | Pressure-to-electricity converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5533025A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2832894B2 (en) * | 1988-07-26 | 1998-12-09 | 日立建機株式会社 | Pressure sensor, method of manufacturing the same, and hydraulic equipment including pressure sensor |
JP2010538254A (en) * | 2007-08-27 | 2010-12-09 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Pressure sensor, sensor probe with pressure sensor, medical device with sensor probe, and method of manufacturing sensor probe |
-
1978
- 1978-08-28 JP JP10477778A patent/JPS5533025A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2832894B2 (en) * | 1988-07-26 | 1998-12-09 | 日立建機株式会社 | Pressure sensor, method of manufacturing the same, and hydraulic equipment including pressure sensor |
JP2010538254A (en) * | 2007-08-27 | 2010-12-09 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Pressure sensor, sensor probe with pressure sensor, medical device with sensor probe, and method of manufacturing sensor probe |
Also Published As
Publication number | Publication date |
---|---|
JPS6222467B2 (en) | 1987-05-18 |
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