GB1088723A - Improvements in and relating to transducers - Google Patents

Improvements in and relating to transducers

Info

Publication number
GB1088723A
GB1088723A GB1153264A GB1153264A GB1088723A GB 1088723 A GB1088723 A GB 1088723A GB 1153264 A GB1153264 A GB 1153264A GB 1153264 A GB1153264 A GB 1153264A GB 1088723 A GB1088723 A GB 1088723A
Authority
GB
United Kingdom
Prior art keywords
points
march
semi
planar
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1153264A
Inventor
Frank Cox
Victor Frederick George Tull
Frederick Edward Duffield
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ether Engineering Ltd
Original Assignee
Ether Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ether Engineering Ltd filed Critical Ether Engineering Ltd
Priority to GB1153264A priority Critical patent/GB1088723A/en
Priority to NL6503394A priority patent/NL6503394A/xx
Priority to LU48214A priority patent/LU48214A1/xx
Publication of GB1088723A publication Critical patent/GB1088723A/en
Priority to DE19686602312 priority patent/DE6602312U/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0047—Diaphragm with non uniform thickness, e.g. with grooves, bosses or continuously varying thickness

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

1,088,723. Semi-conductor strain gauges. ETHER ENGINEERING Ltd. March 15, 1965 [March 18, 1964], No. 11532/64. Heading H1K. [Also in Divisions Gl and H4] A peripherally damped diaphragm for use in pressure transducers or load cells is made 1À5-4 times thicker near its clamping points than at points removed therefrom. This removes the area of maximum stress from the immediate vicinity of the clamping points so that strain transducing elements may be more readily accommodated at points of high stress. Circular diaphragms are described with either one or both surfaces being non-planar to obtain the necessary thickness variation. A surface is generally concave and may be spherical, parabolic, hyperbolic, ellipsoidal, exponential, sinusoidal, or catenary shaped or may be partly planar and partly frusto-conical. The diaphragm may be of a semi-conductor material such as germanium or silicon so that strain gauges may be formed in the surfaces by diffusion.
GB1153264A 1964-03-18 1964-03-18 Improvements in and relating to transducers Expired GB1088723A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB1153264A GB1088723A (en) 1964-03-18 1964-03-18 Improvements in and relating to transducers
NL6503394A NL6503394A (en) 1964-03-18 1965-03-17
LU48214A LU48214A1 (en) 1964-03-18 1965-03-18
DE19686602312 DE6602312U (en) 1964-03-18 1968-09-03 AT THE SAME TIME I REGISTER FOR A USED SAMPLE FOR THIS ITEM.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1153264A GB1088723A (en) 1964-03-18 1964-03-18 Improvements in and relating to transducers

Publications (1)

Publication Number Publication Date
GB1088723A true GB1088723A (en) 1967-10-25

Family

ID=9987961

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1153264A Expired GB1088723A (en) 1964-03-18 1964-03-18 Improvements in and relating to transducers

Country Status (4)

Country Link
DE (1) DE6602312U (en)
GB (1) GB1088723A (en)
LU (1) LU48214A1 (en)
NL (1) NL6503394A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0111640A2 (en) * 1982-09-20 1984-06-27 Hitachi, Ltd. Pressure sensor with semi-conductor diaphragm
FR2619446A1 (en) * 1987-08-14 1989-02-17 Gulton Ind Inc STRAIN GAUGE
EP0312532A1 (en) * 1986-06-30 1989-04-26 Rosemount Inc Differential pressure sensor.
WO2002006784A1 (en) * 2000-07-15 2002-01-24 Robert Bosch Gmbh High pressure sensor, method and tool for producing the same
CN102564684A (en) * 2011-12-27 2012-07-11 中国科学院合肥物质科学研究院 Method for multi-dimensional sensor dynamic test device based on stable-state sine excitation force

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2741523A1 (en) * 1976-09-20 1978-03-23 Honeywell Inc Pressure measuring appts. with semiconductor pressure sensor - has equally wide contact face between pressure sensor and support of different material
US4905575A (en) * 1988-10-20 1990-03-06 Rosemount Inc. Solid state differential pressure sensor with overpressure stop and free edge construction

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0111640A2 (en) * 1982-09-20 1984-06-27 Hitachi, Ltd. Pressure sensor with semi-conductor diaphragm
EP0111640A3 (en) * 1982-09-20 1985-05-15 Hitachi, Ltd. Pressure sensor with semi-conductor diaphragm
EP0312532A1 (en) * 1986-06-30 1989-04-26 Rosemount Inc Differential pressure sensor.
EP0312532A4 (en) * 1986-06-30 1990-09-26 Rosemount Inc Differential pressure sensor
FR2619446A1 (en) * 1987-08-14 1989-02-17 Gulton Ind Inc STRAIN GAUGE
GB2208715A (en) * 1987-08-14 1989-04-12 Gulton Ind Inc Improved strain gage
GB2208715B (en) * 1987-08-14 1991-10-23 Gulton Ind Inc Improved strain gage
WO2002006784A1 (en) * 2000-07-15 2002-01-24 Robert Bosch Gmbh High pressure sensor, method and tool for producing the same
US7028549B2 (en) 2000-07-15 2006-04-18 Robert Bosch Gmbh High-pressure sensor, method and tool for its manufacture
CN102564684A (en) * 2011-12-27 2012-07-11 中国科学院合肥物质科学研究院 Method for multi-dimensional sensor dynamic test device based on stable-state sine excitation force
CN102564684B (en) * 2011-12-27 2013-12-11 中国科学院合肥物质科学研究院 Method for multi-dimensional sensor dynamic test device based on stable-state sine excitation force

Also Published As

Publication number Publication date
LU48214A1 (en) 1965-05-18
DE6602312U (en) 1969-05-22
NL6503394A (en) 1965-09-20

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