GB1094862A - Improvements in and relating to strain gauges - Google Patents
Improvements in and relating to strain gaugesInfo
- Publication number
- GB1094862A GB1094862A GB1333364A GB1333364A GB1094862A GB 1094862 A GB1094862 A GB 1094862A GB 1333364 A GB1333364 A GB 1333364A GB 1333364 A GB1333364 A GB 1333364A GB 1094862 A GB1094862 A GB 1094862A
- Authority
- GB
- United Kingdom
- Prior art keywords
- diaphragm
- strain
- elements
- transducer
- transverse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
1,094,862. Semi-conductor strain gauges. ETHER ENGINEERING Ltd. March 29, 1965 [March 31, 1964], No. 13333/64. Heading H1K. [Also in Division G1] A transducer has a plurality of elongate piezo-resistive semi-conductor elements formed integrally with an edge-clamped circular diaphragm at one of its faces, and is so designed that substantially no adverse interaction occurs between the response of each element to transverse and longitudinal strain. This is achieved either by so orientating an element relative to the crystal structure that the response to transverse strain is much less than that to longitudinal strain (or vice versa) or by positioning the element on the diaphragm in a region where it will be strained in only one of the transverse and longitudinal directions. The diaphragm is made of a monocrystalline semi-conductor such as silicon and the elements are formed by localized diffusion or epitaxial growth. The embodiments illustrated (not shown) each have four active elements which in operation are used as the four arms of a bridge. The transducer is used to measure the differential pressure between the two sides of its diaphragm. Because of the clamping there will be little tangential strain at the periphery of the diaphragm and the diaphragm will have a double curvature under the impressed load resulting in the presence of a neutral circle at which the radial strain is zero. The position, orientation relative to the crystal axes, and conductivity type of the elements are chosen bearing in mind these facts. It is stated that the transducer may have only two elements (responding in opposite senses) which are connected in a half-bridge arrangement.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1333364A GB1094862A (en) | 1964-03-31 | 1964-03-31 | Improvements in and relating to strain gauges |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1333364A GB1094862A (en) | 1964-03-31 | 1964-03-31 | Improvements in and relating to strain gauges |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1094862A true GB1094862A (en) | 1967-12-13 |
Family
ID=10021030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1333364A Expired GB1094862A (en) | 1964-03-31 | 1964-03-31 | Improvements in and relating to strain gauges |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1094862A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3662312A (en) * | 1968-03-23 | 1972-05-09 | Ferranti Ltd | Semiconductor strain transducers |
GB2000639A (en) * | 1977-06-29 | 1979-01-10 | Tokyo Shibaura Electric Co | Semiconductor device |
WO2006016136A3 (en) * | 2004-08-10 | 2006-07-27 | Dage Prec Ind Ltd | Shear test device |
US7905152B2 (en) | 2006-02-17 | 2011-03-15 | Nordson Corporation | Shear test apparatus and method |
-
1964
- 1964-03-31 GB GB1333364A patent/GB1094862A/en not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3662312A (en) * | 1968-03-23 | 1972-05-09 | Ferranti Ltd | Semiconductor strain transducers |
GB2000639A (en) * | 1977-06-29 | 1979-01-10 | Tokyo Shibaura Electric Co | Semiconductor device |
GB2000639B (en) * | 1977-06-29 | 1982-03-31 | Tokyo Shibaura Electric Co | Semiconductor device |
WO2006016136A3 (en) * | 2004-08-10 | 2006-07-27 | Dage Prec Ind Ltd | Shear test device |
US7730790B2 (en) | 2004-08-10 | 2010-06-08 | Nordson Corporation | Shear test device |
US7997147B2 (en) | 2004-08-10 | 2011-08-16 | Nordson Corporation | Shear test device |
US7905152B2 (en) | 2006-02-17 | 2011-03-15 | Nordson Corporation | Shear test apparatus and method |
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