GB1094474A - Improvements in and relating to transducers - Google Patents

Improvements in and relating to transducers

Info

Publication number
GB1094474A
GB1094474A GB2187263A GB2187263A GB1094474A GB 1094474 A GB1094474 A GB 1094474A GB 2187263 A GB2187263 A GB 2187263A GB 2187263 A GB2187263 A GB 2187263A GB 1094474 A GB1094474 A GB 1094474A
Authority
GB
United Kingdom
Prior art keywords
conductivity
semi
active regions
transducers
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2187263A
Inventor
Frank Cox
Francis Gullbride
Victor Frederick George Tull
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ether Engineering Ltd
Original Assignee
Ether Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ether Engineering Ltd filed Critical Ether Engineering Ltd
Priority to GB2187263A priority Critical patent/GB1094474A/en
Publication of GB1094474A publication Critical patent/GB1094474A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
    • G01P15/123—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance by piezo-resistive elements, e.g. semiconductor strain gauges

Abstract

1,094,474. Piezo-resistive devices. ETHER ENGINEERING Ltd. Aug. 10, 1964 [May 31, 1963], No. 21872/63. Heading H1K. [Also in Division G1] Various electromechanical transducers incorporate at least one semi-conductor beam having one or more localized active regions different in conductivity or in conductivity-type to the rest of the beam. Each beam is clamped near its ends and has a stress coupled to spaced points between its ends to obtain a substantially uniform strain along the length of the beam. The only semi-conductor identified is silicon. It is suggested that the active regions may be produced by diffusion through an oxide mask. Gold contacts may be used. The transducers described are an accelerometer and an instrument for measuring fluid pressure.
GB2187263A 1963-05-31 1963-05-31 Improvements in and relating to transducers Expired GB1094474A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB2187263A GB1094474A (en) 1963-05-31 1963-05-31 Improvements in and relating to transducers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2187263A GB1094474A (en) 1963-05-31 1963-05-31 Improvements in and relating to transducers

Publications (1)

Publication Number Publication Date
GB1094474A true GB1094474A (en) 1967-12-13

Family

ID=10170233

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2187263A Expired GB1094474A (en) 1963-05-31 1963-05-31 Improvements in and relating to transducers

Country Status (1)

Country Link
GB (1) GB1094474A (en)

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