JPS57171235A - Semiconductor pressure converter - Google Patents
Semiconductor pressure converterInfo
- Publication number
- JPS57171235A JPS57171235A JP5672581A JP5672581A JPS57171235A JP S57171235 A JPS57171235 A JP S57171235A JP 5672581 A JP5672581 A JP 5672581A JP 5672581 A JP5672581 A JP 5672581A JP S57171235 A JPS57171235 A JP S57171235A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor pressure
- base
- pressure converter
- pellet
- massproduce
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
Abstract
PURPOSE:To obtain a semiconductor pressure converter easy to massproduce with a limited zero point variation by the temperature by setting the ratio of thickness between a base and the peripheral section of a pressure sensitive pellet making up a semiconductor pressure converter by bonding within a specified range. CONSTITUTION:A base 23 made of Si material is securely bonded on a pressure-sensitive pellet 21 equipped with a diffused strain resistance gauge 22 on a diaphragm surface with a solder glass. The base is securely bonded on a package 24 made of ceramic or the like to form a semiconductor pressure detector. When the thickness (d) of the base 23 is set 1.5-4 times as large as that (a) of the peripheral section of the pellet 21, the zero point variation by the temperature can be minimized even when the thermal expansion coefficient of the package is larger than that of the silicone of the pellet. This provides a semiconductor pressure converter easy to massproduce with a better temperature characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5672581A JPS57171235A (en) | 1981-04-15 | 1981-04-15 | Semiconductor pressure converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5672581A JPS57171235A (en) | 1981-04-15 | 1981-04-15 | Semiconductor pressure converter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57171235A true JPS57171235A (en) | 1982-10-21 |
Family
ID=13035464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5672581A Pending JPS57171235A (en) | 1981-04-15 | 1981-04-15 | Semiconductor pressure converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57171235A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6427635U (en) * | 1987-08-11 | 1989-02-17 | ||
| JP2021502553A (en) * | 2017-11-08 | 2021-01-28 | ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフトＴｄｋ Ｅｌｅｃｔｒｏｎｉｃｓ Ａｇ | Pressure sensor system with protection against frozen media |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50108975A (en) * | 1974-02-01 | 1975-08-27 | ||
| JPS50147293A (en) * | 1974-05-15 | 1975-11-26 | ||
| JPS5219091A (en) * | 1975-08-02 | 1977-01-14 | Nippon Denso Co Ltd | Semiconductor pressure-electricity converter |
| JPS5734372A (en) * | 1980-08-09 | 1982-02-24 | Nippon Denso Co Ltd | Semiconductor pressure transducer |
-
1981
- 1981-04-15 JP JP5672581A patent/JPS57171235A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50108975A (en) * | 1974-02-01 | 1975-08-27 | ||
| JPS50147293A (en) * | 1974-05-15 | 1975-11-26 | ||
| JPS5219091A (en) * | 1975-08-02 | 1977-01-14 | Nippon Denso Co Ltd | Semiconductor pressure-electricity converter |
| JPS5734372A (en) * | 1980-08-09 | 1982-02-24 | Nippon Denso Co Ltd | Semiconductor pressure transducer |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6427635U (en) * | 1987-08-11 | 1989-02-17 | ||
| JP2021502553A (en) * | 2017-11-08 | 2021-01-28 | ティーディーケイ・エレクトロニクス・アクチェンゲゼルシャフトＴｄｋ Ｅｌｅｃｔｒｏｎｉｃｓ Ａｇ | Pressure sensor system with protection against frozen media |
| US11561146B2 (en) | 2017-11-08 | 2023-01-24 | Tdk Electronics Ag | Pressure sensor system having protection against freezing medium |
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