JPS55103441A - Pressure converter - Google Patents

Pressure converter

Info

Publication number
JPS55103441A
JPS55103441A JP1089579A JP1089579A JPS55103441A JP S55103441 A JPS55103441 A JP S55103441A JP 1089579 A JP1089579 A JP 1089579A JP 1089579 A JP1089579 A JP 1089579A JP S55103441 A JPS55103441 A JP S55103441A
Authority
JP
Japan
Prior art keywords
strain
substance
film
thin
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1089579A
Other languages
Japanese (ja)
Inventor
Akira Ote
Muneki Ran
Koji Akiyama
Yuzo Ozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP1089579A priority Critical patent/JPS55103441A/en
Publication of JPS55103441A publication Critical patent/JPS55103441A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To realize the miniaturization and the mass production for the pressure converter by using the strain causing substance composed of the insulating material and the thin-film strain gauge element.
CONSTITUTION: Insulating film 2 composed of the oxide such as SiO2 or the like is coated when necessary onto the surface of strain causing substance 1 composed of the insulating material such as the semiconductor wafer of Si, etc., the sapphire, the crystal, the quartz and the like. And then thin-film strain gauge element 3 composed of the metal thin-film material of the Ni-Cr group or the like is distributed selectively through sputtering or other methods. After this, protective film 4 composed of the high molecular compound, the oxide and the like is coated when necessary. Then substance 1 is adhered to attachment plate 5 containing pressure introduction hole 5' and featuring the same material and same thermal expansion coefficient. Thus in case the strain is caused due to the pressure applied to substance 1, element 3 has the resistance change in accordance with the scale of the strain. And the pressure applied to substance 1 is converted into the electric signal to be extracted.
COPYRIGHT: (C)1980,JPO&Japio
JP1089579A 1979-02-01 1979-02-01 Pressure converter Pending JPS55103441A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1089579A JPS55103441A (en) 1979-02-01 1979-02-01 Pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1089579A JPS55103441A (en) 1979-02-01 1979-02-01 Pressure converter

Publications (1)

Publication Number Publication Date
JPS55103441A true JPS55103441A (en) 1980-08-07

Family

ID=11763033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1089579A Pending JPS55103441A (en) 1979-02-01 1979-02-01 Pressure converter

Country Status (1)

Country Link
JP (1) JPS55103441A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4768011A (en) * 1985-12-24 1988-08-30 Nippon Soken, Inc. Joint structure for diamond body and metallic body
JPH01134234U (en) * 1988-03-08 1989-09-13
JPH055664A (en) * 1991-10-23 1993-01-14 Tokai Rika Co Ltd Ceramic pressure sensor
US5310610A (en) * 1988-05-07 1994-05-10 Sharp Kabushiki Kaisha Silicon micro sensor and manufacturing method therefor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4768011A (en) * 1985-12-24 1988-08-30 Nippon Soken, Inc. Joint structure for diamond body and metallic body
JPH01134234U (en) * 1988-03-08 1989-09-13
US5310610A (en) * 1988-05-07 1994-05-10 Sharp Kabushiki Kaisha Silicon micro sensor and manufacturing method therefor
JPH055664A (en) * 1991-10-23 1993-01-14 Tokai Rika Co Ltd Ceramic pressure sensor

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