JPS6421977A - Magnetoresistance element - Google Patents
Magnetoresistance elementInfo
- Publication number
- JPS6421977A JPS6421977A JP62177507A JP17750787A JPS6421977A JP S6421977 A JPS6421977 A JP S6421977A JP 62177507 A JP62177507 A JP 62177507A JP 17750787 A JP17750787 A JP 17750787A JP S6421977 A JPS6421977 A JP S6421977A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- parts
- layers
- film layer
- nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Hall/Mr Elements (AREA)
Abstract
PURPOSE:To bring the heat to be applied to a ferromagnetic metal into low temperature and to contrive the improvement of a moisture absorption resistance and a reduction in a mechanical strain by a method wherein the exposed parts of an insulating layer, a magnetic thin film layer and conducting layers are covered with a protective film layer consisting of Si nitride excepting parts which are used as external connecting parts. CONSTITUTION:An Si single crystal wafer or a glass plate is used as a substrate 1 and an insulating layer 2, which is formed on the substrate 1 and consists of SiO2 and so on, a magnetic thin film layer 3, which is formed on the layer 2 and consists of a permalloy, and conducting layers 5, which are formed on the layer 3 and consist of gold and so on, are provided. The exposed parts of the layers 2, 3 and 5 are covered with a protective film layer 7 consisting of Si nitride excepting parts which are used as external connecting parts. For example, the layers 5 are adhered on parts of the layer 3 having a meandering pattern through adhesive layers 4 consisting of Ti, Cr and so on and the exposed parts of the layers 2, 3 and 5 are covered with the layer 7, which is formed by a plasma CVD method consists of Si nitride.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62177507A JPS6421977A (en) | 1987-07-16 | 1987-07-16 | Magnetoresistance element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62177507A JPS6421977A (en) | 1987-07-16 | 1987-07-16 | Magnetoresistance element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6421977A true JPS6421977A (en) | 1989-01-25 |
Family
ID=16032115
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62177507A Pending JPS6421977A (en) | 1987-07-16 | 1987-07-16 | Magnetoresistance element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6421977A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03263886A (en) * | 1990-03-14 | 1991-11-25 | Fujitsu Ltd | Magnetic resistance element and manufacture thereof |
JPH0715054A (en) * | 1993-06-23 | 1995-01-17 | Nec Corp | Magneto-resistance element |
-
1987
- 1987-07-16 JP JP62177507A patent/JPS6421977A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03263886A (en) * | 1990-03-14 | 1991-11-25 | Fujitsu Ltd | Magnetic resistance element and manufacture thereof |
JPH0715054A (en) * | 1993-06-23 | 1995-01-17 | Nec Corp | Magneto-resistance element |
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