JPS551176A - Semiconductor strain convertor - Google Patents
Semiconductor strain convertorInfo
- Publication number
- JPS551176A JPS551176A JP3562679A JP3562679A JPS551176A JP S551176 A JPS551176 A JP S551176A JP 3562679 A JP3562679 A JP 3562679A JP 3562679 A JP3562679 A JP 3562679A JP S551176 A JPS551176 A JP S551176A
- Authority
- JP
- Japan
- Prior art keywords
- strain
- main surface
- semiconductor
- metal
- gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To better the electric insulation characteristics berween the semiconductor member and the metal strain causing body by means of an insulating thin film formed on the side of a semiconductor strain gauge with a strain measuring means composed of the gauge and the metal material glued only on the area excluding the proximity around the second main surface.
CONSTITUTION: A semiconductor strain gauge 1 having a strain sensitive region on the first main surface of a single crystal conductor is integrated with a strain measuring means 17 made of metal material through an alloy material 18. In this arrangement, an insulating substance 15 is entrely applied on the second main surface 14 of the conductor facing the first main surface of thereof. The second main surface 14 is glues only on the central portion of the crystal through the alloy material avoiding at least the surrounding area of thereof. An insulating thin film is formed on the side of the semiconductor strain gauge as a two-layer film made by a vapor phase reaction method or a sputtering method so as to improve the insulation characteristics between the semiconductor means and the metal strain causing body.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54035626A JPS5810868B2 (en) | 1979-03-28 | 1979-03-28 | semiconductor strain transducer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54035626A JPS5810868B2 (en) | 1979-03-28 | 1979-03-28 | semiconductor strain transducer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS551176A true JPS551176A (en) | 1980-01-07 |
JPS5810868B2 JPS5810868B2 (en) | 1983-02-28 |
Family
ID=12447065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54035626A Expired JPS5810868B2 (en) | 1979-03-28 | 1979-03-28 | semiconductor strain transducer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5810868B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62257807A (en) * | 1986-05-06 | 1987-11-10 | トヨタ自動車株式会社 | Injection molding method of ceramics |
US4769204A (en) * | 1985-12-03 | 1988-09-06 | Shin-Etsu Chemical Co., Ltd. | Method of reactive injection molding of a urethane-based resin composition with good mold releasability and a polyol therefor |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0543889Y2 (en) * | 1985-02-18 | 1993-11-05 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5093785A (en) * | 1973-12-21 | 1975-07-26 |
-
1979
- 1979-03-28 JP JP54035626A patent/JPS5810868B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5093785A (en) * | 1973-12-21 | 1975-07-26 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4769204A (en) * | 1985-12-03 | 1988-09-06 | Shin-Etsu Chemical Co., Ltd. | Method of reactive injection molding of a urethane-based resin composition with good mold releasability and a polyol therefor |
JPS62257807A (en) * | 1986-05-06 | 1987-11-10 | トヨタ自動車株式会社 | Injection molding method of ceramics |
JPH0568322B2 (en) * | 1986-05-06 | 1993-09-28 | Toyota Motor Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5810868B2 (en) | 1983-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5425178A (en) | Manufacture for semiconductor device | |
JPS52127257A (en) | Displacement converter | |
JPS551176A (en) | Semiconductor strain convertor | |
JPS5658253A (en) | Capacitor for integrated circuit | |
JPS568863A (en) | Substrate for semiconductor device | |
JPS5316589A (en) | Semiconductor pressure transducer | |
JPS5441673A (en) | Semiconductor device and its manufacture | |
JPS523383A (en) | Manufacturing method of semiconductor device electrode | |
JPS5662382A (en) | Hall element | |
JPS5359880A (en) | Connector applied for aluminum conductor | |
JPS558005A (en) | Bonding pad substructure | |
JPS52117063A (en) | Preparation of ohmic ontact layer in semiconductor device | |
JPS5267963A (en) | Manufacture of semiconductor unit | |
JPS5539043A (en) | Strain gauge and its adhesion | |
JPS5626234A (en) | Semiconductor pressure converter | |
JPS5348671A (en) | Electrode structure of semiconductor element | |
JPS5356969A (en) | Production of tape for tape carrier | |
JPS5364467A (en) | Electrode | |
JPS5368970A (en) | Solder electrode structure | |
JPS5612525A (en) | Load converter | |
JPS55113380A (en) | Semiconductor displacement transducer | |
JPS5626446A (en) | Semiconductor device | |
JPS5358249A (en) | Thermal head and its manufacture | |
JPS53107288A (en) | Semiconductor strain transducer | |
JPS56118375A (en) | Semiconductor displacement convertor |