JPS5626234A - Semiconductor pressure converter - Google Patents
Semiconductor pressure converterInfo
- Publication number
- JPS5626234A JPS5626234A JP10199179A JP10199179A JPS5626234A JP S5626234 A JPS5626234 A JP S5626234A JP 10199179 A JP10199179 A JP 10199179A JP 10199179 A JP10199179 A JP 10199179A JP S5626234 A JPS5626234 A JP S5626234A
- Authority
- JP
- Japan
- Prior art keywords
- film
- protective film
- ambient atmosphere
- silicon
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To increase the stability to both the ambient atmosphere and temperature, by providing the protective film which is conductive and has the resistance to the ambient atmosphere onto the insulating protective film of the diaphragm and at the same time providing a pair of external leads at the both ends of the above- mentioned protective film to secure the inductive heating.
CONSTITUTION: Insulating protective film 5 made of the silicon oxide film or the silicon nitride is formed on the surface of diffusion gauge resistance layer 2 formed on silicon which is adhered onto silicon support board 7 by adhesive 9. Then protective film 12 made of the metal film, tantalum oxide film or the like and having the resistance to the ambient atmosphere and the conducting performance is formed on film 5 as if it covered over the region of diaphragm 6. A pair of external leads 14 are connected to the both ends of film 12, and the electric conduction is secured for leads 14 to give the heating. Thus a constant temperature can be kept for layer 2. As a result, the stability of the temperature is increased with no effect given by the gas or the liquid to be measured, at the same time reducing the amount of power consumption.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10199179A JPS5626234A (en) | 1979-08-08 | 1979-08-08 | Semiconductor pressure converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10199179A JPS5626234A (en) | 1979-08-08 | 1979-08-08 | Semiconductor pressure converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5626234A true JPS5626234A (en) | 1981-03-13 |
Family
ID=14315292
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10199179A Pending JPS5626234A (en) | 1979-08-08 | 1979-08-08 | Semiconductor pressure converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5626234A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6329981A (en) * | 1986-07-24 | 1988-02-08 | Toshiba Corp | Semiconductor pressure transducer |
JP2006349627A (en) * | 2005-06-20 | 2006-12-28 | Yokohama Rubber Co Ltd:The | Method and device for detecting wire position |
-
1979
- 1979-08-08 JP JP10199179A patent/JPS5626234A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6329981A (en) * | 1986-07-24 | 1988-02-08 | Toshiba Corp | Semiconductor pressure transducer |
JP2006349627A (en) * | 2005-06-20 | 2006-12-28 | Yokohama Rubber Co Ltd:The | Method and device for detecting wire position |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5626234A (en) | Semiconductor pressure converter | |
JPS54138384A (en) | Semiconductor pressure converter | |
JPS6486538A (en) | Member for semiconductor device | |
JPS5543415A (en) | Semiconductor pressure converter | |
JPS57136132A (en) | Semiconductor pressure transducer | |
JPS5759389A (en) | Semiconductor strain gauge type pressure sensor | |
JPS55103441A (en) | Pressure converter | |
JPS55134325A (en) | Temperature sensor | |
JPS5272196A (en) | Thin film el element | |
JPS5629130A (en) | Temperature sensor | |
JPS551176A (en) | Semiconductor strain convertor | |
JPS5330274A (en) | Semiconductor device | |
JPS5578224A (en) | Temperature sensor | |
JPS55117934A (en) | Thermosensitive element | |
JPS54149486A (en) | Pressure-sensitive element | |
JPS51145267A (en) | Manufacture of semiconductor device | |
JPS5440583A (en) | Semiconductor device | |
JPS57204176A (en) | Semiconductor pressure converter | |
JPS5441673A (en) | Semiconductor device and its manufacture | |
JPS52116169A (en) | Composite semiconductor device | |
JPS54145196A (en) | Gas sensitive element | |
JPS5245262A (en) | Semiconductor device | |
JPS55117264A (en) | Semiconductor device | |
JPS5527670A (en) | Pressure-electric signal converter | |
JPS5350676A (en) | Semiconductor device |