JPS5626234A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS5626234A
JPS5626234A JP10199179A JP10199179A JPS5626234A JP S5626234 A JPS5626234 A JP S5626234A JP 10199179 A JP10199179 A JP 10199179A JP 10199179 A JP10199179 A JP 10199179A JP S5626234 A JPS5626234 A JP S5626234A
Authority
JP
Japan
Prior art keywords
film
protective film
ambient atmosphere
silicon
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10199179A
Other languages
Japanese (ja)
Inventor
Toru Kameda
Shoichi Kakimoto
Josuke Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10199179A priority Critical patent/JPS5626234A/en
Publication of JPS5626234A publication Critical patent/JPS5626234A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To increase the stability to both the ambient atmosphere and temperature, by providing the protective film which is conductive and has the resistance to the ambient atmosphere onto the insulating protective film of the diaphragm and at the same time providing a pair of external leads at the both ends of the above- mentioned protective film to secure the inductive heating.
CONSTITUTION: Insulating protective film 5 made of the silicon oxide film or the silicon nitride is formed on the surface of diffusion gauge resistance layer 2 formed on silicon which is adhered onto silicon support board 7 by adhesive 9. Then protective film 12 made of the metal film, tantalum oxide film or the like and having the resistance to the ambient atmosphere and the conducting performance is formed on film 5 as if it covered over the region of diaphragm 6. A pair of external leads 14 are connected to the both ends of film 12, and the electric conduction is secured for leads 14 to give the heating. Thus a constant temperature can be kept for layer 2. As a result, the stability of the temperature is increased with no effect given by the gas or the liquid to be measured, at the same time reducing the amount of power consumption.
COPYRIGHT: (C)1981,JPO&Japio
JP10199179A 1979-08-08 1979-08-08 Semiconductor pressure converter Pending JPS5626234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10199179A JPS5626234A (en) 1979-08-08 1979-08-08 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10199179A JPS5626234A (en) 1979-08-08 1979-08-08 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
JPS5626234A true JPS5626234A (en) 1981-03-13

Family

ID=14315292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10199179A Pending JPS5626234A (en) 1979-08-08 1979-08-08 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS5626234A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329981A (en) * 1986-07-24 1988-02-08 Toshiba Corp Semiconductor pressure transducer
JP2006349627A (en) * 2005-06-20 2006-12-28 Yokohama Rubber Co Ltd:The Method and device for detecting wire position

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329981A (en) * 1986-07-24 1988-02-08 Toshiba Corp Semiconductor pressure transducer
JP2006349627A (en) * 2005-06-20 2006-12-28 Yokohama Rubber Co Ltd:The Method and device for detecting wire position

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