JPS5543415A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS5543415A
JPS5543415A JP11592178A JP11592178A JPS5543415A JP S5543415 A JPS5543415 A JP S5543415A JP 11592178 A JP11592178 A JP 11592178A JP 11592178 A JP11592178 A JP 11592178A JP S5543415 A JPS5543415 A JP S5543415A
Authority
JP
Japan
Prior art keywords
silicon
diaphragm
insulator
fitted
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11592178A
Other languages
Japanese (ja)
Inventor
Minoru Takahashi
Tomotsugu Inui
Hitoshi Minorikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11592178A priority Critical patent/JPS5543415A/en
Publication of JPS5543415A publication Critical patent/JPS5543415A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a pressure converter of simple structure suitable for automobiles by contact bonding the silicon diaphragm with the insulator made of a material substantially equal to silicon in thermal expansion coefficient directly or indirectly.
CONSTITUTION: The silicon diaphragm 1 is connected to a glass die having a similar thermal expansion coefficient to the silicon. The glass die 2 has a pressure guide opening 3 is adhered t the insulator 5 having a pressure guide opening 4 formed by alumina by silicon adhesive 6 and the like having a small effect of distorsion. The electrode 7 of the diaphragm 1 is electrically connected to the electrode 9 of the amplifier circuit 8 insulatingly secured by the wire bonding through the metallic wire 10. The insulator lines are fitted into the metallic housing 12 through the packing and at the same time the protection cover 14 covers the diaphragm 1 and is fitted thereto be fastened to the metallic housing by the additional securing the integrated therewith.
COPYRIGHT: (C)1980,JPO&Japio
JP11592178A 1978-09-22 1978-09-22 Semiconductor pressure converter Pending JPS5543415A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11592178A JPS5543415A (en) 1978-09-22 1978-09-22 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11592178A JPS5543415A (en) 1978-09-22 1978-09-22 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
JPS5543415A true JPS5543415A (en) 1980-03-27

Family

ID=14674495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11592178A Pending JPS5543415A (en) 1978-09-22 1978-09-22 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS5543415A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159573A (en) * 1983-03-02 1984-09-10 Yamatake Honeywell Co Ltd Semiconductor pressure converter
JPS62126322A (en) * 1985-11-26 1987-06-08 Nippon Denso Co Ltd Semiconductive pressure sensor
JPS62207923A (en) * 1986-03-07 1987-09-12 Taiheiyo Kogyo Kk Pressure detecting device
JPH01257112A (en) * 1988-04-05 1989-10-13 Nissan Chem Ind Ltd Stable high concentrated aqueous calcium nitrite solution
JPH03296277A (en) * 1990-04-13 1991-12-26 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH0834454A (en) * 1994-07-21 1996-02-06 Toyo Glass Co Ltd Inner lid for container

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59159573A (en) * 1983-03-02 1984-09-10 Yamatake Honeywell Co Ltd Semiconductor pressure converter
JPS62126322A (en) * 1985-11-26 1987-06-08 Nippon Denso Co Ltd Semiconductive pressure sensor
JPS62207923A (en) * 1986-03-07 1987-09-12 Taiheiyo Kogyo Kk Pressure detecting device
JPH01257112A (en) * 1988-04-05 1989-10-13 Nissan Chem Ind Ltd Stable high concentrated aqueous calcium nitrite solution
JPH03296277A (en) * 1990-04-13 1991-12-26 Mitsubishi Electric Corp Semiconductor pressure sensor
JPH0834454A (en) * 1994-07-21 1996-02-06 Toyo Glass Co Ltd Inner lid for container

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