JPS5543415A - Semiconductor pressure converter - Google Patents
Semiconductor pressure converterInfo
- Publication number
- JPS5543415A JPS5543415A JP11592178A JP11592178A JPS5543415A JP S5543415 A JPS5543415 A JP S5543415A JP 11592178 A JP11592178 A JP 11592178A JP 11592178 A JP11592178 A JP 11592178A JP S5543415 A JPS5543415 A JP S5543415A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- diaphragm
- insulator
- fitted
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To provide a pressure converter of simple structure suitable for automobiles by contact bonding the silicon diaphragm with the insulator made of a material substantially equal to silicon in thermal expansion coefficient directly or indirectly.
CONSTITUTION: The silicon diaphragm 1 is connected to a glass die having a similar thermal expansion coefficient to the silicon. The glass die 2 has a pressure guide opening 3 is adhered t the insulator 5 having a pressure guide opening 4 formed by alumina by silicon adhesive 6 and the like having a small effect of distorsion. The electrode 7 of the diaphragm 1 is electrically connected to the electrode 9 of the amplifier circuit 8 insulatingly secured by the wire bonding through the metallic wire 10. The insulator lines are fitted into the metallic housing 12 through the packing and at the same time the protection cover 14 covers the diaphragm 1 and is fitted thereto be fastened to the metallic housing by the additional securing the integrated therewith.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11592178A JPS5543415A (en) | 1978-09-22 | 1978-09-22 | Semiconductor pressure converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11592178A JPS5543415A (en) | 1978-09-22 | 1978-09-22 | Semiconductor pressure converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5543415A true JPS5543415A (en) | 1980-03-27 |
Family
ID=14674495
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11592178A Pending JPS5543415A (en) | 1978-09-22 | 1978-09-22 | Semiconductor pressure converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5543415A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59159573A (en) * | 1983-03-02 | 1984-09-10 | Yamatake Honeywell Co Ltd | Semiconductor pressure converter |
JPS62126322A (en) * | 1985-11-26 | 1987-06-08 | Nippon Denso Co Ltd | Semiconductive pressure sensor |
JPS62207923A (en) * | 1986-03-07 | 1987-09-12 | Taiheiyo Kogyo Kk | Pressure detecting device |
JPH01257112A (en) * | 1988-04-05 | 1989-10-13 | Nissan Chem Ind Ltd | Stable high concentrated aqueous calcium nitrite solution |
JPH03296277A (en) * | 1990-04-13 | 1991-12-26 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
JPH0834454A (en) * | 1994-07-21 | 1996-02-06 | Toyo Glass Co Ltd | Inner lid for container |
-
1978
- 1978-09-22 JP JP11592178A patent/JPS5543415A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59159573A (en) * | 1983-03-02 | 1984-09-10 | Yamatake Honeywell Co Ltd | Semiconductor pressure converter |
JPS62126322A (en) * | 1985-11-26 | 1987-06-08 | Nippon Denso Co Ltd | Semiconductive pressure sensor |
JPS62207923A (en) * | 1986-03-07 | 1987-09-12 | Taiheiyo Kogyo Kk | Pressure detecting device |
JPH01257112A (en) * | 1988-04-05 | 1989-10-13 | Nissan Chem Ind Ltd | Stable high concentrated aqueous calcium nitrite solution |
JPH03296277A (en) * | 1990-04-13 | 1991-12-26 | Mitsubishi Electric Corp | Semiconductor pressure sensor |
JPH0834454A (en) * | 1994-07-21 | 1996-02-06 | Toyo Glass Co Ltd | Inner lid for container |
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