JPS5484985A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS5484985A
JPS5484985A JP15242477A JP15242477A JPS5484985A JP S5484985 A JPS5484985 A JP S5484985A JP 15242477 A JP15242477 A JP 15242477A JP 15242477 A JP15242477 A JP 15242477A JP S5484985 A JPS5484985 A JP S5484985A
Authority
JP
Japan
Prior art keywords
diaphragm
cover
junction
electrode
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15242477A
Other languages
Japanese (ja)
Other versions
JPS581551B2 (en
Inventor
Michitaka Shimazoe
Yasutoshi Kurihara
Motohisa Nishihara
Komei Yatsuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15242477A priority Critical patent/JPS581551B2/en
Publication of JPS5484985A publication Critical patent/JPS5484985A/en
Publication of JPS581551B2 publication Critical patent/JPS581551B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To prevent characteristic deterioration by covering all of contact parts on the circumference of a diaphragm with cover materials and a multi-layer metallic film and cutting off completely the pn junction in the diaphragm from outside air.
CONSTITUTION: In diaphragm 21, p-type gage resistance 23 and contact part 23A are arranged around a n-type Si thin part, and the pn junction is protected by insulating film 35. Cover 25 which has cavity 24 at the center and has hole 26 corresponding to contact part 23A and has a thermal expansion coefficient approximating Si is put on diaphragm 21, and the cavity is made into a vacuum to unite the diaphragm and the cover. Next, metallic thin film 27 having the most upper layer consisting of precious metal is evaporated from the upper face side of the cover through the side face of hole 26. Next, glass tube 29 which has a thermal expansion coefficient approximating Si is coupled. Ceramic plate 30 is arranged on cover 25, and its electrode 31 is connected to metallic film 27. Lead 32 of electrode 31 and a part of glass tube 29 are sealed with resin. Thus, the pn junction of the diaphragm is completely cut off from outside air.
COPYRIGHT: (C)1979,JPO&Japio
JP15242477A 1977-12-20 1977-12-20 semiconductor pressure transducer Expired JPS581551B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15242477A JPS581551B2 (en) 1977-12-20 1977-12-20 semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15242477A JPS581551B2 (en) 1977-12-20 1977-12-20 semiconductor pressure transducer

Publications (2)

Publication Number Publication Date
JPS5484985A true JPS5484985A (en) 1979-07-06
JPS581551B2 JPS581551B2 (en) 1983-01-11

Family

ID=15540204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15242477A Expired JPS581551B2 (en) 1977-12-20 1977-12-20 semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS581551B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135323A (en) * 1984-06-07 1986-02-19 バイサラ・オ−ワイ Capacitive pressure detector and manufacture thereof
CN106461490A (en) * 2014-08-01 2017-02-22 Vega格里沙贝两合公司 Pressure measuring arrangement and method for producing said pressure measuring arrangment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135323A (en) * 1984-06-07 1986-02-19 バイサラ・オ−ワイ Capacitive pressure detector and manufacture thereof
CN106461490A (en) * 2014-08-01 2017-02-22 Vega格里沙贝两合公司 Pressure measuring arrangement and method for producing said pressure measuring arrangment

Also Published As

Publication number Publication date
JPS581551B2 (en) 1983-01-11

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