JPS54149486A - Pressure-sensitive element - Google Patents

Pressure-sensitive element

Info

Publication number
JPS54149486A
JPS54149486A JP5711078A JP5711078A JPS54149486A JP S54149486 A JPS54149486 A JP S54149486A JP 5711078 A JP5711078 A JP 5711078A JP 5711078 A JP5711078 A JP 5711078A JP S54149486 A JPS54149486 A JP S54149486A
Authority
JP
Japan
Prior art keywords
pressure
sensitive element
diaphragm part
concentratedly
diffusion resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5711078A
Other languages
Japanese (ja)
Other versions
JPS6153871B2 (en
Inventor
Tadahiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5711078A priority Critical patent/JPS54149486A/en
Publication of JPS54149486A publication Critical patent/JPS54149486A/en
Publication of JPS6153871B2 publication Critical patent/JPS6153871B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)

Abstract

PURPOSE: To improve a zero point temperature characteristic by forming a diffusion resistance layer concentratedly in the one-end part of a diaphragm part and constituting this layer so that the influence of metallic electrodes may be minimum in the pressure-sensitive element used in a semiconductor pressure converter, etc.
CONSTITUTION: P-type diffusion resistance layers 22, 23 and 24 are formed concentratedly in the one-end part of round and thin diaphragm part 21 on n-type semiconductor substrate 20 having this diaphragm part 21, and metallic electrodes 25a to 25g are connected. 26 in the figure indicates the insulating film of a SiO2 film.
COPYRIGHT: (C)1979,JPO&Japio
JP5711078A 1978-05-16 1978-05-16 Pressure-sensitive element Granted JPS54149486A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5711078A JPS54149486A (en) 1978-05-16 1978-05-16 Pressure-sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5711078A JPS54149486A (en) 1978-05-16 1978-05-16 Pressure-sensitive element

Publications (2)

Publication Number Publication Date
JPS54149486A true JPS54149486A (en) 1979-11-22
JPS6153871B2 JPS6153871B2 (en) 1986-11-19

Family

ID=13046373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5711078A Granted JPS54149486A (en) 1978-05-16 1978-05-16 Pressure-sensitive element

Country Status (1)

Country Link
JP (1) JPS54149486A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582805A (en) * 1991-09-19 1993-04-02 Mitsubishi Electric Corp Pressure detecting chip of semiconductor pressure detector

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105285A (en) * 1974-01-25 1975-08-19
JPS51143380A (en) * 1975-06-04 1976-12-09 Hitachi Ltd Semiconductor pressure converter
JPS5217780A (en) * 1975-07-04 1977-02-09 Hitachi Ltd Pressure convertor with semi-conductor elements
JPS52119971A (en) * 1976-03-31 1977-10-07 Honeywell Inc Force converter
JPS5362581A (en) * 1976-11-17 1978-06-05 Hitachi Ltd Pressure detecting element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105285A (en) * 1974-01-25 1975-08-19
JPS51143380A (en) * 1975-06-04 1976-12-09 Hitachi Ltd Semiconductor pressure converter
JPS5217780A (en) * 1975-07-04 1977-02-09 Hitachi Ltd Pressure convertor with semi-conductor elements
JPS52119971A (en) * 1976-03-31 1977-10-07 Honeywell Inc Force converter
JPS5362581A (en) * 1976-11-17 1978-06-05 Hitachi Ltd Pressure detecting element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0582805A (en) * 1991-09-19 1993-04-02 Mitsubishi Electric Corp Pressure detecting chip of semiconductor pressure detector

Also Published As

Publication number Publication date
JPS6153871B2 (en) 1986-11-19

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