JPS54149486A - Pressure-sensitive element - Google Patents
Pressure-sensitive elementInfo
- Publication number
- JPS54149486A JPS54149486A JP5711078A JP5711078A JPS54149486A JP S54149486 A JPS54149486 A JP S54149486A JP 5711078 A JP5711078 A JP 5711078A JP 5711078 A JP5711078 A JP 5711078A JP S54149486 A JPS54149486 A JP S54149486A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sensitive element
- diaphragm part
- concentratedly
- diffusion resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
PURPOSE: To improve a zero point temperature characteristic by forming a diffusion resistance layer concentratedly in the one-end part of a diaphragm part and constituting this layer so that the influence of metallic electrodes may be minimum in the pressure-sensitive element used in a semiconductor pressure converter, etc.
CONSTITUTION: P-type diffusion resistance layers 22, 23 and 24 are formed concentratedly in the one-end part of round and thin diaphragm part 21 on n-type semiconductor substrate 20 having this diaphragm part 21, and metallic electrodes 25a to 25g are connected. 26 in the figure indicates the insulating film of a SiO2 film.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5711078A JPS54149486A (en) | 1978-05-16 | 1978-05-16 | Pressure-sensitive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5711078A JPS54149486A (en) | 1978-05-16 | 1978-05-16 | Pressure-sensitive element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54149486A true JPS54149486A (en) | 1979-11-22 |
JPS6153871B2 JPS6153871B2 (en) | 1986-11-19 |
Family
ID=13046373
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5711078A Granted JPS54149486A (en) | 1978-05-16 | 1978-05-16 | Pressure-sensitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54149486A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0582805A (en) * | 1991-09-19 | 1993-04-02 | Mitsubishi Electric Corp | Pressure detecting chip of semiconductor pressure detector |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50105285A (en) * | 1974-01-25 | 1975-08-19 | ||
JPS51143380A (en) * | 1975-06-04 | 1976-12-09 | Hitachi Ltd | Semiconductor pressure converter |
JPS5217780A (en) * | 1975-07-04 | 1977-02-09 | Hitachi Ltd | Pressure convertor with semi-conductor elements |
JPS52119971A (en) * | 1976-03-31 | 1977-10-07 | Honeywell Inc | Force converter |
JPS5362581A (en) * | 1976-11-17 | 1978-06-05 | Hitachi Ltd | Pressure detecting element |
-
1978
- 1978-05-16 JP JP5711078A patent/JPS54149486A/en active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50105285A (en) * | 1974-01-25 | 1975-08-19 | ||
JPS51143380A (en) * | 1975-06-04 | 1976-12-09 | Hitachi Ltd | Semiconductor pressure converter |
JPS5217780A (en) * | 1975-07-04 | 1977-02-09 | Hitachi Ltd | Pressure convertor with semi-conductor elements |
JPS52119971A (en) * | 1976-03-31 | 1977-10-07 | Honeywell Inc | Force converter |
JPS5362581A (en) * | 1976-11-17 | 1978-06-05 | Hitachi Ltd | Pressure detecting element |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0582805A (en) * | 1991-09-19 | 1993-04-02 | Mitsubishi Electric Corp | Pressure detecting chip of semiconductor pressure detector |
Also Published As
Publication number | Publication date |
---|---|
JPS6153871B2 (en) | 1986-11-19 |
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