JPS5285488A - Semiconductor resistance element - Google Patents
Semiconductor resistance elementInfo
- Publication number
- JPS5285488A JPS5285488A JP154676A JP154676A JPS5285488A JP S5285488 A JPS5285488 A JP S5285488A JP 154676 A JP154676 A JP 154676A JP 154676 A JP154676 A JP 154676A JP S5285488 A JPS5285488 A JP S5285488A
- Authority
- JP
- Japan
- Prior art keywords
- resistance element
- semiconductor resistance
- forming
- groove group
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/8605—Resistors with PN junctions
Abstract
PURPOSE:To reduce the occupying area of a resistor and increase the density of integration by forming a groove group of a V-form section by anisotropic etching on the surface of a semiconductor substrate and forming a resistance layer through impurity diffusion, etc. along the continuous surface including said groove group.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP154676A JPS5285488A (en) | 1976-01-09 | 1976-01-09 | Semiconductor resistance element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP154676A JPS5285488A (en) | 1976-01-09 | 1976-01-09 | Semiconductor resistance element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5285488A true JPS5285488A (en) | 1977-07-15 |
Family
ID=11504509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP154676A Pending JPS5285488A (en) | 1976-01-09 | 1976-01-09 | Semiconductor resistance element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5285488A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5632755A (en) * | 1979-08-24 | 1981-04-02 | Nec Corp | Semiconductor device |
FR2905522A1 (en) * | 2006-08-31 | 2008-03-07 | St Microelectronics Sa | Three dimensional resister for e.g. P type lightly doped single crystal silicon substrate, has vertical path along walls and horizontal path along base in N type strongly doped layer, where layer extends on walls and base of one trench |
-
1976
- 1976-01-09 JP JP154676A patent/JPS5285488A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5632755A (en) * | 1979-08-24 | 1981-04-02 | Nec Corp | Semiconductor device |
FR2905522A1 (en) * | 2006-08-31 | 2008-03-07 | St Microelectronics Sa | Three dimensional resister for e.g. P type lightly doped single crystal silicon substrate, has vertical path along walls and horizontal path along base in N type strongly doped layer, where layer extends on walls and base of one trench |
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