JPS5316589A - Semiconductor pressure transducer - Google Patents

Semiconductor pressure transducer

Info

Publication number
JPS5316589A
JPS5316589A JP9108376A JP9108376A JPS5316589A JP S5316589 A JPS5316589 A JP S5316589A JP 9108376 A JP9108376 A JP 9108376A JP 9108376 A JP9108376 A JP 9108376A JP S5316589 A JPS5316589 A JP S5316589A
Authority
JP
Japan
Prior art keywords
pressure transducer
semiconductor pressure
insualtion
pedestal
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9108376A
Other languages
Japanese (ja)
Inventor
Yasuo Matsushita
Tetsuo Kosugi
Michitaka Shimazoe
Takeo Yamazaki
Hideyuki Nemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9108376A priority Critical patent/JPS5316589A/en
Publication of JPS5316589A publication Critical patent/JPS5316589A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To perfectly insulate a pressure sensitive element and a transducer body by providing electric insualtion layers within a pedestal or metal supporting member.
COPYRIGHT: (C)1978,JPO&Japio
JP9108376A 1976-07-29 1976-07-29 Semiconductor pressure transducer Pending JPS5316589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9108376A JPS5316589A (en) 1976-07-29 1976-07-29 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9108376A JPS5316589A (en) 1976-07-29 1976-07-29 Semiconductor pressure transducer

Publications (1)

Publication Number Publication Date
JPS5316589A true JPS5316589A (en) 1978-02-15

Family

ID=14016609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9108376A Pending JPS5316589A (en) 1976-07-29 1976-07-29 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS5316589A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58211961A (en) * 1982-06-04 1983-12-09 古河電気工業株式会社 Structure of travelling path for magnet type continuous transport system
JPS6157826A (en) * 1984-08-29 1986-03-24 Hitachi Ltd Pressure transducer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58211961A (en) * 1982-06-04 1983-12-09 古河電気工業株式会社 Structure of travelling path for magnet type continuous transport system
JPS6147243B2 (en) * 1982-06-04 1986-10-18 Furukawa Electric Co Ltd
JPS6157826A (en) * 1984-08-29 1986-03-24 Hitachi Ltd Pressure transducer

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