JPS57185174A - Thin film thermal head and manufacture thereof - Google Patents

Thin film thermal head and manufacture thereof

Info

Publication number
JPS57185174A
JPS57185174A JP56070453A JP7045381A JPS57185174A JP S57185174 A JPS57185174 A JP S57185174A JP 56070453 A JP56070453 A JP 56070453A JP 7045381 A JP7045381 A JP 7045381A JP S57185174 A JPS57185174 A JP S57185174A
Authority
JP
Japan
Prior art keywords
manufacture
protective film
thin film
thermal head
sputtering gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56070453A
Other languages
Japanese (ja)
Other versions
JPH0124634B2 (en
Inventor
Keiji Nunomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56070453A priority Critical patent/JPS57185174A/en
Publication of JPS57185174A publication Critical patent/JPS57185174A/en
Publication of JPH0124634B2 publication Critical patent/JPH0124634B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for

Abstract

PURPOSE:To manufacture a thin film thermal head excellent in wear resistance, thermal shock resistance, oxygen shielding property, and adhesion by providing a specific surface protective layer on an insulation base plate having a heating resistor and a lead electrode. CONSTITUTION:On the surface of an insulation base plate 1, a patterned heating resistor 2 and a patterned lead electrode 3 are formed, and on them, the first SiO2 protective film 4 is formed by using a sputtering gas containing O2 and an Si target. Then, the sputtering gas is continuously replaced with Ar gas in such a way as to gradually reduce the concentration of O2 to form a buffer layer having an O2 concentration gradient, and then the second Si protective film 5 is formed. Then, the sputtering gas is continuously replaced with Ar gas containing C2H4 to form a buffer layer having a C concentration gradient, and then the third SiC protective film 6 is formed.
JP56070453A 1981-05-11 1981-05-11 Thin film thermal head and manufacture thereof Granted JPS57185174A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56070453A JPS57185174A (en) 1981-05-11 1981-05-11 Thin film thermal head and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56070453A JPS57185174A (en) 1981-05-11 1981-05-11 Thin film thermal head and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS57185174A true JPS57185174A (en) 1982-11-15
JPH0124634B2 JPH0124634B2 (en) 1989-05-12

Family

ID=13431933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56070453A Granted JPS57185174A (en) 1981-05-11 1981-05-11 Thin film thermal head and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57185174A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60109862A (en) * 1983-11-18 1985-06-15 Mitani Denshi Kogyo Kk Thermal head
US5557313A (en) * 1992-11-12 1996-09-17 Tdk Corporation Wear-resistant protective film for thermal head and method of producing the same
US6483528B1 (en) * 1999-06-15 2002-11-19 Rohm Co., Ltd. Thermal print head and method of manufacturing thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60109862A (en) * 1983-11-18 1985-06-15 Mitani Denshi Kogyo Kk Thermal head
US5557313A (en) * 1992-11-12 1996-09-17 Tdk Corporation Wear-resistant protective film for thermal head and method of producing the same
US6471832B1 (en) 1992-11-12 2002-10-29 Tdk Corporation Method of producing protected thermal head
US7106356B2 (en) 1992-11-12 2006-09-12 Tdk Corporation Thermal head having wear-resistant protective film
US6483528B1 (en) * 1999-06-15 2002-11-19 Rohm Co., Ltd. Thermal print head and method of manufacturing thereof

Also Published As

Publication number Publication date
JPH0124634B2 (en) 1989-05-12

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