JPS57126677A - Electrode - Google Patents
ElectrodeInfo
- Publication number
- JPS57126677A JPS57126677A JP56012064A JP1206481A JPS57126677A JP S57126677 A JPS57126677 A JP S57126677A JP 56012064 A JP56012064 A JP 56012064A JP 1206481 A JP1206481 A JP 1206481A JP S57126677 A JPS57126677 A JP S57126677A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- spattering
- evaporation
- instance
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910018182 Al—Cu Inorganic materials 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- -1 TaSi Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electrodes Of Semiconductors (AREA)
- Facsimile Heads (AREA)
- Electronic Switches (AREA)
Abstract
PURPOSE:To obtain a novel electrode fitted for a head for thermal facsimile by forming the same of a Cu layer and an Al-Cu complex layer and by reducing contact resistance to a heating resistor having large contact resistance to Al, as much as possible, to make thereby the contact excellent. CONSTITUTION:A glazed layer 2, for instance, is formed on the surface of a substrate 1 and thereon the heating resistor 3 of the thin film of alloy such as TaSi, TaN and Mosi is formed by spattering, evaporation or the like. Next, the Cu layer 11 forming a foundation in contact with the resistor 3 and the glazed layer 2 is formed by spattering, evaporation or the like. And further thereon the Al-Cu complex layer 12 containing Cu of 4-5%, for instance, is formed and made to constitute the electrode 13 by pattering. On ths surface thereof a protection film 5 is formed, preferably, of SiO2, Al2O3 or the like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56012064A JPS57126677A (en) | 1981-01-29 | 1981-01-29 | Electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56012064A JPS57126677A (en) | 1981-01-29 | 1981-01-29 | Electrode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57126677A true JPS57126677A (en) | 1982-08-06 |
Family
ID=11795167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56012064A Pending JPS57126677A (en) | 1981-01-29 | 1981-01-29 | Electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57126677A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430769A (en) * | 1987-07-28 | 1989-02-01 | Toshiba Corp | Thermal head |
-
1981
- 1981-01-29 JP JP56012064A patent/JPS57126677A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430769A (en) * | 1987-07-28 | 1989-02-01 | Toshiba Corp | Thermal head |
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