JPS5463293A - Thermal head - Google Patents

Thermal head

Info

Publication number
JPS5463293A
JPS5463293A JP12948277A JP12948277A JPS5463293A JP S5463293 A JPS5463293 A JP S5463293A JP 12948277 A JP12948277 A JP 12948277A JP 12948277 A JP12948277 A JP 12948277A JP S5463293 A JPS5463293 A JP S5463293A
Authority
JP
Japan
Prior art keywords
film
crb
sputtering
resistor
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12948277A
Other languages
Japanese (ja)
Other versions
JPS6022801B2 (en
Inventor
Akira Niimi
Toshitami Hara
Masahisa Fukui
Yoshiaki Shirato
Yoshiki Hajimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP52129482A priority Critical patent/JPS6022801B2/en
Priority to US05/906,359 priority patent/US4296309A/en
Priority to DE19782821950 priority patent/DE2821950A1/en
Publication of JPS5463293A publication Critical patent/JPS5463293A/en
Priority to US06/552,013 priority patent/US4545881A/en
Publication of JPS6022801B2 publication Critical patent/JPS6022801B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electronic Switches (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Conductive Materials (AREA)

Abstract

PURPOSE: To raise oxidation resistance, the stability of resistance value, and resistivity by forming CrB2 theremogenous resistor by electronic beam deposition or sputtering and then by covering and then by covering it with a protective layer with conductor.
CONSTITUTION: The surface of the base plate 1, as, for example, of ceramic glass, grazed ceramica, etc., is formed with the CrB2 thin film theremogenous resistor 2, the Al or Au conductor 3 for power supply, and the protective layer 4 of SiO2, Ta2O5, Al2O3, MgO, etc., or a multilayer of these, for protecting the resistor 2 and the conductor 3. The formation of the CrB2 film is made by either electronic beam deposition or sputtering. When the base plate being processed for forming the film is heated to 200 to 500°C, the adhesiveness of the film is made better, and also the heating of the base plate covered with the film at 200 at 650°C results in the regulation and stabilization of resistance value. The sputtering is made in Ar when the target used is CrB2 or Cr and B, but the sputtering is made in a mixed gas of Ar and diborane when the target is Cr alone.
COPYRIGHT: (C)1979,JPO&Japio
JP52129482A 1977-05-19 1977-10-28 thermal head Expired JPS6022801B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP52129482A JPS6022801B2 (en) 1977-10-28 1977-10-28 thermal head
US05/906,359 US4296309A (en) 1977-05-19 1978-05-15 Thermal head
DE19782821950 DE2821950A1 (en) 1977-05-19 1978-05-19 Head for thermal printing with stable resistance - obtd. by sputtering a metal boride resistance heating element onto a glazed substrate
US06/552,013 US4545881A (en) 1977-05-19 1983-11-16 Method for producing electro-thermal transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52129482A JPS6022801B2 (en) 1977-10-28 1977-10-28 thermal head

Publications (2)

Publication Number Publication Date
JPS5463293A true JPS5463293A (en) 1979-05-22
JPS6022801B2 JPS6022801B2 (en) 1985-06-04

Family

ID=15010565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52129482A Expired JPS6022801B2 (en) 1977-05-19 1977-10-28 thermal head

Country Status (1)

Country Link
JP (1) JPS6022801B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6242203U (en) * 1985-08-30 1987-03-13

Also Published As

Publication number Publication date
JPS6022801B2 (en) 1985-06-04

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