JPS5335483A - Resistance element and its production - Google Patents
Resistance element and its productionInfo
- Publication number
- JPS5335483A JPS5335483A JP11045176A JP11045176A JPS5335483A JP S5335483 A JPS5335483 A JP S5335483A JP 11045176 A JP11045176 A JP 11045176A JP 11045176 A JP11045176 A JP 11045176A JP S5335483 A JPS5335483 A JP S5335483A
- Authority
- JP
- Japan
- Prior art keywords
- resistance element
- production
- layer
- porous
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: A Si layer is grown on an insulating substrate such as quartz and is made porous to become a resistance layer while controlling to give a desired resistance value and an atmosphere sensitivity, so that a porous resistance element which is suitable for incorporation into an IC unit can be obtained.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11045176A JPS5335483A (en) | 1976-09-14 | 1976-09-14 | Resistance element and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11045176A JPS5335483A (en) | 1976-09-14 | 1976-09-14 | Resistance element and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5335483A true JPS5335483A (en) | 1978-04-01 |
Family
ID=14536041
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11045176A Pending JPS5335483A (en) | 1976-09-14 | 1976-09-14 | Resistance element and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5335483A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5636153A (en) * | 1979-08-31 | 1981-04-09 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
-
1976
- 1976-09-14 JP JP11045176A patent/JPS5335483A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5636153A (en) * | 1979-08-31 | 1981-04-09 | Mitsubishi Electric Corp | Semiconductor integrated circuit |
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