JPS5335483A - Resistance element and its production - Google Patents

Resistance element and its production

Info

Publication number
JPS5335483A
JPS5335483A JP11045176A JP11045176A JPS5335483A JP S5335483 A JPS5335483 A JP S5335483A JP 11045176 A JP11045176 A JP 11045176A JP 11045176 A JP11045176 A JP 11045176A JP S5335483 A JPS5335483 A JP S5335483A
Authority
JP
Japan
Prior art keywords
resistance element
production
layer
porous
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11045176A
Other languages
Japanese (ja)
Inventor
Takayuki Kadaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Gakki Co Ltd
Original Assignee
Nippon Gakki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Gakki Co Ltd filed Critical Nippon Gakki Co Ltd
Priority to JP11045176A priority Critical patent/JPS5335483A/en
Publication of JPS5335483A publication Critical patent/JPS5335483A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: A Si layer is grown on an insulating substrate such as quartz and is made porous to become a resistance layer while controlling to give a desired resistance value and an atmosphere sensitivity, so that a porous resistance element which is suitable for incorporation into an IC unit can be obtained.
COPYRIGHT: (C)1978,JPO&Japio
JP11045176A 1976-09-14 1976-09-14 Resistance element and its production Pending JPS5335483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11045176A JPS5335483A (en) 1976-09-14 1976-09-14 Resistance element and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11045176A JPS5335483A (en) 1976-09-14 1976-09-14 Resistance element and its production

Publications (1)

Publication Number Publication Date
JPS5335483A true JPS5335483A (en) 1978-04-01

Family

ID=14536041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11045176A Pending JPS5335483A (en) 1976-09-14 1976-09-14 Resistance element and its production

Country Status (1)

Country Link
JP (1) JPS5335483A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636153A (en) * 1979-08-31 1981-04-09 Mitsubishi Electric Corp Semiconductor integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636153A (en) * 1979-08-31 1981-04-09 Mitsubishi Electric Corp Semiconductor integrated circuit

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