JPS5522819A - Semiconductor strain gauge absolute pressure sensor - Google Patents

Semiconductor strain gauge absolute pressure sensor

Info

Publication number
JPS5522819A
JPS5522819A JP9461678A JP9461678A JPS5522819A JP S5522819 A JPS5522819 A JP S5522819A JP 9461678 A JP9461678 A JP 9461678A JP 9461678 A JP9461678 A JP 9461678A JP S5522819 A JPS5522819 A JP S5522819A
Authority
JP
Japan
Prior art keywords
hole
stem
pressure sensor
strain gauge
absolute pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9461678A
Other languages
Japanese (ja)
Inventor
Kiyomitsu Suzuki
Motohisa Nishihara
Hiroji Kawakami
Shigeyuki Kobori
Komei Yatsuno
Minoru Takahashi
Kaoru Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9461678A priority Critical patent/JPS5522819A/en
Publication of JPS5522819A publication Critical patent/JPS5522819A/en
Pending legal-status Critical Current

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Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To improve durability by jointing Si pellet having strain gauge on one end surface of glass tube having similar heat expansion coefficiency with that of Si and jointing Si basic plate having a through-hole and a stem in a inner surface on another end surface to form a vacuum chamber on the pellet.
CONSTITUTION: On a stem 17 having a through-hole 32 in the center thereof, Si basic plate 25 having also a hole 33 is secured and as the hole 33 and hole 34 are fitted each other, a glass tube 24 having substantially same heat expansion coefficiency is jointed thereon. Then, semiconductor pellet 22 having pressure sensitive diaphragm 22 is secured to the upper surface and electrodes disposed thereon and a lead 20 passed through the stem 17 by using a glass 21 are jointed by using wire 30. Then, the end of the stem 17 is covered by a cap 18 and welded to form a vacuum chamber 29 in the inner side and a pipe 28 having a hole 27 is disposed under the stem 17. Thus, durability to the environment becomes very good and reliable absolute pressure sensor can be obtained.
COPYRIGHT: (C)1980,JPO&Japio
JP9461678A 1978-08-04 1978-08-04 Semiconductor strain gauge absolute pressure sensor Pending JPS5522819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9461678A JPS5522819A (en) 1978-08-04 1978-08-04 Semiconductor strain gauge absolute pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9461678A JPS5522819A (en) 1978-08-04 1978-08-04 Semiconductor strain gauge absolute pressure sensor

Publications (1)

Publication Number Publication Date
JPS5522819A true JPS5522819A (en) 1980-02-18

Family

ID=14115174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9461678A Pending JPS5522819A (en) 1978-08-04 1978-08-04 Semiconductor strain gauge absolute pressure sensor

Country Status (1)

Country Link
JP (1) JPS5522819A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207838A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Optical fiber type pressure sensor
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JP2016205873A (en) * 2015-04-16 2016-12-08 株式会社不二工機 Pressure sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207838A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Optical fiber type pressure sensor
JPH023128B2 (en) * 1981-06-17 1990-01-22 Hitachi Ltd
JPS6461637A (en) * 1987-09-02 1989-03-08 Matsushita Electric Ind Co Ltd Semiconductor pressure sensor
JP2016205873A (en) * 2015-04-16 2016-12-08 株式会社不二工機 Pressure sensor

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