JPS5522819A - Semiconductor strain gauge absolute pressure sensor - Google Patents
Semiconductor strain gauge absolute pressure sensorInfo
- Publication number
- JPS5522819A JPS5522819A JP9461678A JP9461678A JPS5522819A JP S5522819 A JPS5522819 A JP S5522819A JP 9461678 A JP9461678 A JP 9461678A JP 9461678 A JP9461678 A JP 9461678A JP S5522819 A JPS5522819 A JP S5522819A
- Authority
- JP
- Japan
- Prior art keywords
- hole
- stem
- pressure sensor
- strain gauge
- absolute pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To improve durability by jointing Si pellet having strain gauge on one end surface of glass tube having similar heat expansion coefficiency with that of Si and jointing Si basic plate having a through-hole and a stem in a inner surface on another end surface to form a vacuum chamber on the pellet.
CONSTITUTION: On a stem 17 having a through-hole 32 in the center thereof, Si basic plate 25 having also a hole 33 is secured and as the hole 33 and hole 34 are fitted each other, a glass tube 24 having substantially same heat expansion coefficiency is jointed thereon. Then, semiconductor pellet 22 having pressure sensitive diaphragm 22 is secured to the upper surface and electrodes disposed thereon and a lead 20 passed through the stem 17 by using a glass 21 are jointed by using wire 30. Then, the end of the stem 17 is covered by a cap 18 and welded to form a vacuum chamber 29 in the inner side and a pipe 28 having a hole 27 is disposed under the stem 17. Thus, durability to the environment becomes very good and reliable absolute pressure sensor can be obtained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9461678A JPS5522819A (en) | 1978-08-04 | 1978-08-04 | Semiconductor strain gauge absolute pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9461678A JPS5522819A (en) | 1978-08-04 | 1978-08-04 | Semiconductor strain gauge absolute pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5522819A true JPS5522819A (en) | 1980-02-18 |
Family
ID=14115174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9461678A Pending JPS5522819A (en) | 1978-08-04 | 1978-08-04 | Semiconductor strain gauge absolute pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5522819A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57207838A (en) * | 1981-06-17 | 1982-12-20 | Hitachi Ltd | Optical fiber type pressure sensor |
JPS6461637A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JP2016205873A (en) * | 2015-04-16 | 2016-12-08 | 株式会社不二工機 | Pressure sensor |
-
1978
- 1978-08-04 JP JP9461678A patent/JPS5522819A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57207838A (en) * | 1981-06-17 | 1982-12-20 | Hitachi Ltd | Optical fiber type pressure sensor |
JPH023128B2 (en) * | 1981-06-17 | 1990-01-22 | Hitachi Ltd | |
JPS6461637A (en) * | 1987-09-02 | 1989-03-08 | Matsushita Electric Ind Co Ltd | Semiconductor pressure sensor |
JP2016205873A (en) * | 2015-04-16 | 2016-12-08 | 株式会社不二工機 | Pressure sensor |
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