JPS5612528A - Pressure transducer - Google Patents
Pressure transducerInfo
- Publication number
- JPS5612528A JPS5612528A JP8821079A JP8821079A JPS5612528A JP S5612528 A JPS5612528 A JP S5612528A JP 8821079 A JP8821079 A JP 8821079A JP 8821079 A JP8821079 A JP 8821079A JP S5612528 A JPS5612528 A JP S5612528A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- thermal
- bridge circuit
- strain gauge
- semiconductor strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
PURPOSE: To obtain the pressure sensor of the pressure transducer of less thermal influence, by connecting a thermal resistor, which has resistance-thermal coefficient opposite to that of a semiconductor strain gauge, to a bridge circuit, which is composed of the semiconductor strain gauge, as a thermal compensation resistor.
CONSTITUTION: Seal diaphragms 15 and 16, a pressure-receive-side liquid chamber 17a which is formed by seal metal fittings 14, and an atmospheric pressure-side liquid chamber 17b in a pressure transducer body 11 are filled with a sealing liquid, and a pin 18 is pressed into the body and welded to be sealed. Processing pressure from a pressure intake 20a presses the seal diaphragm 15 and bends, through the sealing liquid, a semiconductor sensor 1 having on a silicon substrate 2 a bridge circuit as a semiconductor strain gauge, and therefore, this strain is taken out as unbalanced output of the bridge circuit in proportion to the impression pressure. At this time, as a thick-film circuit substrate 6 having thermal resistance opposite to the semiconductor strain gauge is provided in the vicinity of the pressure sensor 1 to be used as a thermal compensating resistor for the bridge circuit, it is possible to obtain a pressure transducer free from thermal influence.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8821079A JPS5612528A (en) | 1979-07-13 | 1979-07-13 | Pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8821079A JPS5612528A (en) | 1979-07-13 | 1979-07-13 | Pressure transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5612528A true JPS5612528A (en) | 1981-02-06 |
Family
ID=13936532
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8821079A Pending JPS5612528A (en) | 1979-07-13 | 1979-07-13 | Pressure transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5612528A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57183904A (en) * | 1981-04-04 | 1982-11-12 | Bosch Gmbh Robert | Device for manufacturing hose baggy package |
| JPS60108720A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Absolute pressure generator |
| JPS60108721A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Pressure and absolute pressure generator |
| JPS60108722A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Differential pressure and pressure transmitter |
| JPS60108723A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Differential pressure and pressure transmitter |
-
1979
- 1979-07-13 JP JP8821079A patent/JPS5612528A/en active Pending
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57183904A (en) * | 1981-04-04 | 1982-11-12 | Bosch Gmbh Robert | Device for manufacturing hose baggy package |
| JPH0220488B2 (en) * | 1981-04-04 | 1990-05-09 | Bosch Gmbh Robert | |
| JPS60108720A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Absolute pressure generator |
| JPS60108721A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Pressure and absolute pressure generator |
| JPS60108722A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Differential pressure and pressure transmitter |
| JPS60108723A (en) * | 1983-11-18 | 1985-06-14 | Yamatake Honeywell Co Ltd | Differential pressure and pressure transmitter |
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