JPS55122126A - Pressure difference converter - Google Patents

Pressure difference converter

Info

Publication number
JPS55122126A
JPS55122126A JP2870479A JP2870479A JPS55122126A JP S55122126 A JPS55122126 A JP S55122126A JP 2870479 A JP2870479 A JP 2870479A JP 2870479 A JP2870479 A JP 2870479A JP S55122126 A JPS55122126 A JP S55122126A
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
pressure difference
measuring
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2870479A
Other languages
Japanese (ja)
Other versions
JPS6239368B2 (en
Inventor
Noboru Ozawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2870479A priority Critical patent/JPS55122126A/en
Publication of JPS55122126A publication Critical patent/JPS55122126A/en
Publication of JPS6239368B2 publication Critical patent/JPS6239368B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To measure the pressure difference regardless of the pressure of measured fluid by providing a pressure receiving diaphragm, which has distinct stiffness against two fluids to be measured, in the housing wherein a measuring diaphragm for detecting the pressure difference is installed.
CONSTITUTION: The high pressure side flange 2 and low pressure side flange 3 are welded to both sides of the housing respectively, and the introduction hole 4 for high pressure fluid of pressure PH and the one 5 for low pressure fluid of pressure PL are opened in both the flanges 2, 3. A pressure measuring chamber is formed in the housing 1 and the pressure receiving diaphragm 7 and measuring diaphragm 8 are installed in the chamber. The measuring diaphragm 8 is made of a single crystal silicon substrate to form four strain gauges 80. When the diaphragm 8 is bent by the pressure difference, two gauges are tensed and other two ones are pressed, these are connected to the Wheatstone bridge circuit, a change of the resistance is detected as a change of the pressure difference.
COPYRIGHT: (C)1980,JPO&Japio
JP2870479A 1979-03-14 1979-03-14 Pressure difference converter Granted JPS55122126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2870479A JPS55122126A (en) 1979-03-14 1979-03-14 Pressure difference converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2870479A JPS55122126A (en) 1979-03-14 1979-03-14 Pressure difference converter

Publications (2)

Publication Number Publication Date
JPS55122126A true JPS55122126A (en) 1980-09-19
JPS6239368B2 JPS6239368B2 (en) 1987-08-22

Family

ID=12255843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2870479A Granted JPS55122126A (en) 1979-03-14 1979-03-14 Pressure difference converter

Country Status (1)

Country Link
JP (1) JPS55122126A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129832A (en) * 1980-02-13 1981-10-12 Honeywell Inc Differential pressure transmitter
JPS6073427A (en) * 1983-09-30 1985-04-25 Toshiba Corp Differential pressure transmitter
JPS61137246U (en) * 1985-02-18 1986-08-26
US4787249A (en) * 1986-06-28 1988-11-29 Eckardt Ag Differential pressure transducer
JPH0421938U (en) * 1990-06-14 1992-02-24

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56129832A (en) * 1980-02-13 1981-10-12 Honeywell Inc Differential pressure transmitter
JPH0248851B2 (en) * 1980-02-13 1990-10-26 Honeywell Inc
JPS6073427A (en) * 1983-09-30 1985-04-25 Toshiba Corp Differential pressure transmitter
JPS61137246U (en) * 1985-02-18 1986-08-26
US4787249A (en) * 1986-06-28 1988-11-29 Eckardt Ag Differential pressure transducer
JPH0421938U (en) * 1990-06-14 1992-02-24

Also Published As

Publication number Publication date
JPS6239368B2 (en) 1987-08-22

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