JPH0421938U

JPH0421938U -

Info

Publication number: JPH0421938U
Application number: JP6288490U
Authority: JP
Priority date: 1990-06-14
Filing date: 1990-06-14
Publication date: 1992-02-24

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例の要部構成説明図、
第２図、第３図、第４図は第１図の動作説明図、
第５図は本考案の他の実施例の要部構成説明図、
第６図は従来より一般に使用されている従来例の
構成説明図、第７図は第６図の動作説明図である
。１……ハウジング、２……高圧側フランジ、３
……低圧側フランジ、４，５……導入口、６……
圧力測定室、６Ａ，６Ｂ，１０Ａ，１１Ａ……バ
ツクプレート、８……シリコンダイアフラム、９
……支持体、１０，１１……圧力同入室、１２，
１３……隔液ダイアフラム、１４，１５，１６，
１７……連通口、８０……ストレインゲージ、２
１……センタダイアフラム、２２……板ばね、２
３……第１室、２４……第２室、２５，３１……
連通孔。 FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
Figures 2, 3, and 4 are explanatory diagrams of the operation of Figure 1;
FIG. 5 is an explanatory diagram of the main part configuration of another embodiment of the present invention,
FIG. 6 is an explanatory diagram of the configuration of a conventional example that has been generally used, and FIG. 7 is an explanatory diagram of the operation of FIG. 6. 1...Housing, 2...High pressure side flange, 3
...Low pressure side flange, 4, 5...Inlet, 6...
Pressure measurement chamber, 6A, 6B, 10A, 11A... Back plate, 8... Silicon diaphragm, 9
...Support, 10,11...Pressure chamber, 12,
13... Separate liquid diaphragm, 14, 15, 16,
17...Communication port, 80...Strain gauge, 2
1... Center diaphragm, 22... Leaf spring, 2
3...1st room, 24...2nd room, 25, 31...
Communication hole.

Claims

[Scope of Claim for Utility Model Registration] A housing filled with a sealed liquid, a pair of liquid separating diaphragms provided on both sides of the housing, and a pair of liquid separating diaphragms provided to prevent the liquid separating diaphragms from being displaced beyond a certain level toward the housing. a silicon diaphragm having a pressure-to-electricity conversion element provided in the housing; a center diaphragm provided in the housing together with the silicon diaphragm so as to be divided into a high-pressure side chamber and a low-pressure side chamber; The low pressure side chamber is provided within the low pressure side chamber, and
A differential pressure measurement characterized by comprising: a plate spring provided so as to be divided into two chambers and a second chamber; and a communication hole provided in the housing and communicating the first chamber and the second chamber. Device.