JPH0432048U - - Google Patents
Info
- Publication number
- JPH0432048U JPH0432048U JP7493990U JP7493990U JPH0432048U JP H0432048 U JPH0432048 U JP H0432048U JP 7493990 U JP7493990 U JP 7493990U JP 7493990 U JP7493990 U JP 7493990U JP H0432048 U JPH0432048 U JP H0432048U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- center diaphragm
- sealed liquid
- measuring device
- pressure side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例の要部構成説明図、
第２図は従来より一般に使用されている従来例の
構成説明図。
１……ハウジング、２……高圧側フランジ、３
……低圧側フランジ、４，５……導入口、６……
圧力測定室、６Ａ，６Ｂ，１０Ａ，１１Ａ……バ
ツクプレート、８……シリコンダイアフラム、１
０，１１……圧力導入室、１２，１３……隔液ダ
イアフラム、１４，１５，１６，１７……連通孔
、２１……センタダイアフラム、２２……センタ
ダイアフラム本体、２３……支持リング、８０…
…ストレインゲージ、１０１，１０２……封入液
。
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
FIG. 2 is a diagram illustrating the configuration of a conventional example that has been commonly used. 1...Housing, 2...High pressure side flange, 3
...Low pressure side flange, 4, 5...Inlet, 6...
Pressure measurement chamber, 6A, 6B, 10A, 11A... Back plate, 8... Silicon diaphragm, 1
0, 11... Pressure introduction chamber, 12, 13... Partitioning diaphragm, 14, 15, 16, 17... Communication hole, 21... Center diaphragm, 22... Center diaphragm body, 23... Support ring, 80 …
...Strain gauge, 101,102...Filled liquid.
Claims (1)
高圧側測定流体と低圧側測定流体とをそれぞれ分
離する隔液ダイアフラムと、 前記ハウジング内に設けられたセンタダイアフ
ラムと、 前記ハウジング内に設けられ該センタダイアフ
ラムと共に前記封入液を２分するように設けられ
半導体よりなる圧力−電気信号変換素子と を具部する差圧測定装置において、 前記センタダイアフラムをセンタダイアフラム
本体と該本体の周縁部を支持し該本体より熱膨張
係数の小さな支持リングとで構成した事を特徴と
する差圧測定装置。[Claims for Utility Model Registration] A housing filled with a sealed liquid; liquid separation diaphragms provided on both sides of the housing to separate the sealed liquid from a high-pressure side measurement fluid and a low-pressure side measurement fluid, respectively; A differential pressure measuring device comprising: a center diaphragm provided in the housing; and a pressure-electrical signal conversion element made of a semiconductor and provided in the housing so as to divide the sealed liquid into two together with the center diaphragm. A differential pressure measuring device, wherein the center diaphragm is comprised of a center diaphragm body and a support ring that supports a peripheral portion of the body and has a smaller coefficient of thermal expansion than the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7493990U JPH0432048U (en) | 1990-07-13 | 1990-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7493990U JPH0432048U (en) | 1990-07-13 | 1990-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0432048U true JPH0432048U (en) | 1992-03-16 |
Family
ID=31615077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7493990U Pending JPH0432048U (en) | 1990-07-13 | 1990-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432048U (en) |
-
1990
- 1990-07-13 JP JP7493990U patent/JPH0432048U/ja active Pending
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