JPH0434642U - - Google Patents
Info
- Publication number
- JPH0434642U JPH0434642U JP7620490U JP7620490U JPH0434642U JP H0434642 U JPH0434642 U JP H0434642U JP 7620490 U JP7620490 U JP 7620490U JP 7620490 U JP7620490 U JP 7620490U JP H0434642 U JPH0434642 U JP H0434642U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- housing
- pressure side
- center
- low
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の一実施例の要部構成説明図、
第２図、第３図、第４図は第１図の動作説明図、
第５図は従来より一般に使用されている従来例の
構成説明図。
１……ハウジング、２……高圧側フランジ、３
……低圧側フランジ、４，５……導入口、６……
圧力測定室、６Ａ，６Ｂ，１０Ａ，１１Ａ……バ
ツクプレート、８……シリコンダイアフラム、９
……支持体、１０，１１……圧力導入室、１２，
１３……隔液ダイアフラム、１４，１５，１６，
１７……連通孔、８０……ストレインゲージ、２
１……センタダイアフラム、２２……阻止手段、
１０１，１０２……封入液。
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
Figures 2, 3, and 4 are explanatory diagrams of the operation of Figure 1;
FIG. 5 is a diagram illustrating the configuration of a conventional example that has been commonly used. 1...Housing, 2...High pressure side flange, 3
...Low pressure side flange, 4, 5...Inlet, 6...
Pressure measurement chamber, 6A, 6B, 10A, 11A... Back plate, 8... Silicon diaphragm, 9
... Support body, 10, 11 ... Pressure introduction chamber, 12,
13... Separate liquid diaphragm, 14, 15, 16,
17...Communication hole, 80...Strain gauge, 2
1... Center diaphragm, 22... Blocking means,
101, 102...Enclosed liquid.
Claims (1)
側隔液ダイアフラムと低圧側隔液ダイアフラムと
、 該低圧側隔液ダイアフラムが一定量以上ハウジ
ング側に変位しないように設けられた移動阻止手
段と、 前記ハウジング内に設けられた圧力−電気変換
素子を有するシリコンダイアフラムと、 前記ハウジングに該シリコンダイアフラムと共
に高圧側室と低圧側室とに２分するように設けら
れたセンタダイアフラムと、 前記低圧側室内の該センタダイアフラムと対向
する壁面に設けられ該センタダイアフラムとわず
かの隙間を形成し該センタダイアフラムが所定量
以上変位するのを阻止する変位阻止手段と を具備したことを特徴とする差圧測定装置。[Scope of Claim for Utility Model Registration] A housing filled with a sealed liquid, a high-pressure side liquid diaphragm and a low-pressure side liquid diaphragm provided on both sides of the housing, and a certain amount of the low-pressure side liquid diaphragm. a movement preventing means provided so as not to be displaced toward the housing; a silicon diaphragm having a pressure-to-electricity conversion element provided in the housing; a center diaphragm provided in the low-pressure side chamber on a wall facing the center diaphragm; and a displacement prevention device provided on a wall facing the center diaphragm and forming a slight gap with the center diaphragm to prevent the center diaphragm from displacing more than a predetermined amount. A differential pressure measuring device characterized by comprising means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7620490U JPH0434642U (en) | 1990-07-18 | 1990-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7620490U JPH0434642U (en) | 1990-07-18 | 1990-07-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0434642U true JPH0434642U (en) | 1992-03-23 |
Family
ID=31617458
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7620490U Pending JPH0434642U (en) | 1990-07-18 | 1990-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0434642U (en) |
-
1990
- 1990-07-18 JP JP7620490U patent/JPH0434642U/ja active Pending
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