JPS59149039U - semiconductor differential pressure detector - Google Patents
semiconductor differential pressure detectorInfo
- Publication number
- JPS59149039U JPS59149039U JP4210483U JP4210483U JPS59149039U JP S59149039 U JPS59149039 U JP S59149039U JP 4210483 U JP4210483 U JP 4210483U JP 4210483 U JP4210483 U JP 4210483U JP S59149039 U JPS59149039 U JP S59149039U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- differential pressure
- pressure detector
- receiving part
- semiconductor differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例の差圧検出器の断面図、第２
図及び第３図は過負荷保護状態を示す断′ 面図である
。
１・・・受圧ハウジング、２．３・・・シールダイアフ
ラム、４．５・・・封入液、６・・・センサ支持台、７
・・・センサ、８・・・過負荷保護ベロー、９・・・過
大圧力吸収膜、１０．１１・・・プレート、１２．１３
・・・０す゛ング、１４．１５・・・弁座、１６．１７
・・・通路。Fig. 1 is a sectional view of a differential pressure detector according to an embodiment of the present invention;
3 and 3 are cross-sectional views showing the overload protection state. DESCRIPTION OF SYMBOLS 1... Pressure receiving housing, 2.3... Seal diaphragm, 4.5... Filled liquid, 6... Sensor support stand, 7
... Sensor, 8 ... Overload protection bellow, 9 ... Excessive pressure absorption membrane, 10.11 ... Plate, 12.13
...0 swing, 14.15...valve seat, 16.17
···aisle.
Claims (1)
アフラムと前記受圧部の他方の側面に外周が固定された
第２ダイアフラムと、前記受圧部内にベローを有し、前
記ベローの一方へ高圧流体の圧力が、他方へ低圧流体の
圧力が作用する差圧検出器において、感圧センサを前記
ベローの内側へ設置したことを特徴とする半導体差圧検
出器。a pressure receiving part; a first diaphragm having an outer periphery fixed to one side of the pressure receiving part; a second diaphragm having an outer periphery fixed to the other side of the pressure receiving part; and a bellows in the pressure receiving part; A semiconductor differential pressure detector in which the pressure of a high-pressure fluid acts on the other side and the pressure of a low-pressure fluid acts on the other, characterized in that a pressure-sensitive sensor is installed inside the bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4210483U JPS59149039U (en) | 1983-03-25 | 1983-03-25 | semiconductor differential pressure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4210483U JPS59149039U (en) | 1983-03-25 | 1983-03-25 | semiconductor differential pressure detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59149039U true JPS59149039U (en) | 1984-10-05 |
Family
ID=30172664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4210483U Pending JPS59149039U (en) | 1983-03-25 | 1983-03-25 | semiconductor differential pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59149039U (en) |
-
1983
- 1983-03-25 JP JP4210483U patent/JPS59149039U/en active Pending
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