JPH01134789U - - Google Patents
Info
- Publication number
- JPH01134789U JPH01134789U JP3104588U JP3104588U JPH01134789U JP H01134789 U JPH01134789 U JP H01134789U JP 3104588 U JP3104588 U JP 3104588U JP 3104588 U JP3104588 U JP 3104588U JP H01134789 U JPH01134789 U JP H01134789U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- diaphragms
- pair
- inlet
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案に係る微流量ポンプの正面断面
図、第２図は同側面図である。
２，２ａ：吐出弁、６：絞り、８：流出口、１
３：流量センサ、１４：可動鉄心、１５：差動変
圧器、１７：演算増幅器、１８：流入口、２４，
２４ａ：ダイヤフラム、２５，２５ａ：吸込弁、
２９：バイモルフ振動板、３１，３３：ハウジン
グ、３６：流量設定器、３９，３９ａ：ポンプ室
、４１：柱。
FIG. 1 is a front sectional view of a microflow pump according to the present invention, and FIG. 2 is a side view of the same. 2, 2a: Discharge valve, 6: Throttle, 8: Outlet, 1
3: flow rate sensor, 14: movable iron core, 15: differential transformer, 17: operational amplifier, 18: inlet, 24,
24a: diaphragm, 25, 25a: suction valve,
29: Bimorph diaphragm, 31, 33: Housing, 36: Flow rate setting device, 39, 39a: Pump chamber, 41: Pillar.
Claims (1)
１対のダイヤフラムの中心部をハウジングに挾持
し、１対のダイヤフラムの間にバイモルフ振動板
を重ね合せて結合し、各ハウジングに流入口に連
通する吸込弁と流出口に連通する吐出弁とをそれ
ぞれ備えたことを特徴とする微流量ポンプ。 The center portions of a pair of diaphragms that partition symmetrical pump chambers inside the housing are sandwiched in the housing, and a bimorph diaphragm is stacked and coupled between the pair of diaphragms, and each housing has a suction port that communicates with the inlet. A microflow pump characterized by comprising a valve and a discharge valve communicating with an outlet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3104588U JPH01134789U (en) | 1988-03-09 | 1988-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3104588U JPH01134789U (en) | 1988-03-09 | 1988-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01134789U true JPH01134789U (en) | 1989-09-14 |
Family
ID=31256622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3104588U Pending JPH01134789U (en) | 1988-03-09 | 1988-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134789U (en) |
-
1988
- 1988-03-09 JP JP3104588U patent/JPH01134789U/ja active Pending