JPS62203984U - - Google Patents
Info
- Publication number
- JPS62203984U JPS62203984U JP9023186U JP9023186U JPS62203984U JP S62203984 U JPS62203984 U JP S62203984U JP 9023186 U JP9023186 U JP 9023186U JP 9023186 U JP9023186 U JP 9023186U JP S62203984 U JPS62203984 U JP S62203984U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- diaphragm chamber
- valve body
- pressure
- discharge device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Compressor (AREA)
- Magnetically Actuated Valves (AREA)
Description
第１図は本考案によるガス比例弁の一実施例の
断面図、第２図は同じく一部の断面図、第３図は
同じく他の実施例の一部断面図、第４図イ及びロ
は同じく圧力特性曲線図、第５図及び第６図は従
来技術によるガス用比例弁の断面図である。
１，１ａ：ガス比例弁、２：弁本体、２１：流
体入口、２２：流体出口、２３：弁座、２４：弁
体、２７：ばね、３：ダイヤフラム室、３１：ダ
イヤフラム、４：圧電ポンプ、４４：入口、４５
：出口、５：排出装置、５１：ニードル弁、５２
：弁体、６：排出装置、６３：ダイヤフラム、６
４：弁体、６７：排気口、６８：ばね。
FIG. 1 is a cross-sectional view of one embodiment of the gas proportional valve according to the present invention, FIG. 2 is a partial cross-sectional view of the same, FIG. 3 is a partial cross-sectional view of another embodiment, and FIGS. Similarly, FIG. 5 is a pressure characteristic curve diagram, and FIGS. 5 and 6 are cross-sectional views of a proportional valve for gas according to the prior art. 1, 1a: gas proportional valve, 2: valve body, 21: fluid inlet, 22: fluid outlet, 23: valve seat, 24: valve body, 27: spring, 3: diaphragm chamber, 31: diaphragm, 4: piezoelectric pump , 44: Entrance, 45
: Outlet, 5: Discharge device, 51: Needle valve, 52
: Valve body, 6: Discharge device, 63: Diaphragm, 6
4: Valve body, 67: Exhaust port, 68: Spring.
Claims (1)
た弁体を該弁座に係合させて流体の流れを制御す
る比例弁において、該弁本体の上部にダイヤフラ
ムにて該弁本体と隔離してダイヤフラム室を設け
、該ダイヤフラム室に圧電ポンプを接続して該圧
電ポンプにより該ダイヤフラム室を加圧可能にし
、該ダイヤフラム室を外部と通ずる排出装置を設
け、該圧電ポンプによる供給量と該排出装置から
の排出量の差により該ダイヤフラム室内の圧力を
調節し、該ダイヤフラム室の圧力を変化させるこ
とにより該弁体の動きを制御するように構成した
ガス比例弁。 (2) 前記排出装置をニードル弁にて形成したこ
とを特徴とした実用新案登録請求の範囲(1)に記
載のガス比例弁。 (3) 前記排出装置が制御するべき流体圧の入口
側圧力に応動する弁体を有し、該入口側圧力が低
圧のとき該弁体により該ダイヤフラム室内の圧力
を排出するようになつていることを特徴とした実
用新案登録請求の範囲(1)に記載の圧電ガス比例
弁。[Claims for Utility Model Registration] (1) In a proportional valve that controls the flow of fluid by engaging a valve element disposed in the valve body facing the valve seat with the valve seat, the upper part of the valve body A diaphragm chamber is provided separated from the valve body by a diaphragm, a piezoelectric pump is connected to the diaphragm chamber to enable the piezoelectric pump to pressurize the diaphragm chamber, and a discharge device is provided to communicate the diaphragm chamber with the outside. , a gas configured to adjust the pressure in the diaphragm chamber based on the difference between the amount supplied by the piezoelectric pump and the amount discharged from the discharge device, and control the movement of the valve body by changing the pressure in the diaphragm chamber. proportional valve. (2) The gas proportional valve according to claim (1), wherein the discharge device is formed of a needle valve. (3) The discharge device has a valve body that responds to the inlet side pressure of the fluid pressure to be controlled, and when the inlet side pressure is low pressure, the valve body discharges the pressure inside the diaphragm chamber. A piezoelectric gas proportional valve according to claim (1) for utility model registration, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9023186U JPS62203984U (en) | 1986-06-13 | 1986-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9023186U JPS62203984U (en) | 1986-06-13 | 1986-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62203984U true JPS62203984U (en) | 1987-12-26 |
Family
ID=30949907
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9023186U Pending JPS62203984U (en) | 1986-06-13 | 1986-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62203984U (en) |
-
1986
- 1986-06-13 JP JP9023186U patent/JPS62203984U/ja active Pending
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