JPH02134372U - - Google Patents
Info
- Publication number
- JPH02134372U JPH02134372U JP4269489U JP4269489U JPH02134372U JP H02134372 U JPH02134372 U JP H02134372U JP 4269489 U JP4269489 U JP 4269489U JP 4269489 U JP4269489 U JP 4269489U JP H02134372 U JPH02134372 U JP H02134372U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- main
- inlet
- outlet parts
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Description
第１図は、この考案の一実施例に係るバルブ装
置を真空予備室に取り付けた例を示す断面図であ
る。第２図は、従来のバルブ装置を真空予備室に
取り付けた例を示す断面図である。
４０……実施例に係るバルブ装置、６１……入
口部、６２……出口部、６３……主通路、６４…
…主弁体、６６……弁胴、７０……バイパス通路
、７１……補助弁体、７２……ニードル。
FIG. 1 is a sectional view showing an example in which a valve device according to an embodiment of the invention is attached to a vacuum preliminary chamber. FIG. 2 is a sectional view showing an example in which a conventional valve device is attached to a vacuum preliminary chamber. 40... Valve device according to the embodiment, 61... Inlet section, 62... Outlet section, 63... Main passage, 64...
...Main valve body, 66...Valve body, 70...Bypass passage, 71...Auxiliary valve body, 72...Needle.
Claims (1)
路の開閉を行う主弁体と、同入口部と出口部間を
主通路とは別につなぐバイパス通路と、このバイ
パス通路の開閉およびそこを流れる気体の流量調
整を行うニードル付の補助弁体とを設けて成るこ
とを特徴とするバルブ装置。 In the common valve body, there is a main valve body that opens and closes the main passage between the inlet and outlet parts, a bypass passage that connects the inlet and outlet parts separately from the main passage, and a main valve body that opens and closes the main passage between the inlet and outlet parts, and A valve device comprising an auxiliary valve body with a needle that adjusts the flow rate of gas flowing therethrough.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269489U JPH02134372U (en) | 1989-04-11 | 1989-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4269489U JPH02134372U (en) | 1989-04-11 | 1989-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02134372U true JPH02134372U (en) | 1990-11-07 |
Family
ID=31554460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4269489U Pending JPH02134372U (en) | 1989-04-11 | 1989-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02134372U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04104318U (en) * | 1991-02-19 | 1992-09-08 | トキコ株式会社 | switching valve |
| WO2004044969A1 (en) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | Valve unit and heat treatment system |
| KR100889665B1 (en) * | 2003-10-13 | 2009-03-19 | 도쿄엘렉트론가부시키가이샤 | Heat treatment apparatus |
-
1989
- 1989-04-11 JP JP4269489U patent/JPH02134372U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04104318U (en) * | 1991-02-19 | 1992-09-08 | トキコ株式会社 | switching valve |
| WO2004044969A1 (en) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | Valve unit and heat treatment system |
| CN100397577C (en) * | 2001-05-14 | 2008-06-25 | 东京毅力科创株式会社 | Valve unit and heat treatment system |
| KR100889665B1 (en) * | 2003-10-13 | 2009-03-19 | 도쿄엘렉트론가부시키가이샤 | Heat treatment apparatus |