JPS631209U - - Google Patents
Info
- Publication number
- JPS631209U JPS631209U JP9260986U JP9260986U JPS631209U JP S631209 U JPS631209 U JP S631209U JP 9260986 U JP9260986 U JP 9260986U JP 9260986 U JP9260986 U JP 9260986U JP S631209 U JPS631209 U JP S631209U
- Authority
- JP
- Japan
- Prior art keywords
- mass flow
- flow controller
- needle
- controller body
- bypass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図はこの考案の一実施例のニードル付きマ
スフローコントローラの断面図である。第２図は
従来のマスフローコントローラの断面図である。
１……マスフローコントローラ、２……ガス入
口、３……ガス出口、４……センサー、５……バ
イパス、６……バルブ、１０……ニードルバルブ
。
FIG. 1 is a sectional view of a mass flow controller with a needle according to an embodiment of this invention. FIG. 2 is a sectional view of a conventional mass flow controller. 1...Mass flow controller, 2...Gas inlet, 3...Gas outlet, 4...Sensor, 5...Bypass, 6...Valve, 10...Needle valve.
Claims (1)
バイパスと、流量制御用バルブとを備えたマスフ
ローコントローラにおいて、 前記マスフローコントローラ本体に、ニードル
バルブを一体に配設したことを特徴とするニード
ル付きマスフローコントローラ。[Scope of claim for utility model registration] The mass flow controller body includes a sensor,
A mass flow controller equipped with a needle, comprising a bypass and a flow control valve, characterized in that a needle valve is integrally provided in the mass flow controller body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9260986U JPS631209U (en) | 1986-06-18 | 1986-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9260986U JPS631209U (en) | 1986-06-18 | 1986-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS631209U true JPS631209U (en) | 1988-01-07 |
Family
ID=30954463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9260986U Pending JPS631209U (en) | 1986-06-18 | 1986-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631209U (en) |
-
1986
- 1986-06-18 JP JP9260986U patent/JPS631209U/ja active Pending