JPS61202685U - - Google Patents
Info
- Publication number
- JPS61202685U JPS61202685U JP8659985U JP8659985U JPS61202685U JP S61202685 U JPS61202685 U JP S61202685U JP 8659985 U JP8659985 U JP 8659985U JP 8659985 U JP8659985 U JP 8659985U JP S61202685 U JPS61202685 U JP S61202685U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- liquid supply
- chamber
- supply device
- liquid chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims 1
- 238000009499 grossing Methods 0.000 description 2
- 230000010349 pulsation Effects 0.000 description 1
Landscapes
- Reciprocating Pumps (AREA)
Description
第１図は本考案にかかわる脈動平滑機能を備え
た夜液供給装置の断面図、第２図は従来の平滑装
置の断面図、を示す。
図において、１，７，１４は吸込口、２，８，
１５は吐出口、３は平滑槽、４は上蓋、５，１３
はバルブ、６はポンプ、９は薬液供給装置、１０
はエアー室、１１は薬液室、１２はダイヤフラム
、をそれぞれ示す。
FIG. 1 is a sectional view of a night liquid supply device with a pulsation smoothing function according to the present invention, and FIG. 2 is a sectional view of a conventional smoothing device. In the figure, 1, 7, 14 are suction ports, 2, 8,
15 is a discharge port, 3 is a smooth tank, 4 is an upper lid, 5, 13
is a valve, 6 is a pump, 9 is a chemical supply device, 10
11 represents an air chamber, 11 represents a chemical liquid chamber, and 12 represents a diaphragm.
Claims (1)
薬液室の一部がダイヤフラム１２よりなる隔壁に
より密閉されたエアー室１０に接して設けられて
いることを特徴とする薬液供給装置。 A chemical liquid supply device characterized in that a chemical liquid chamber 11 is provided in the middle of a chemical liquid supply path, and a part of the chemical liquid chamber is provided in contact with an air chamber 10 that is sealed by a partition wall made of a diaphragm 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8659985U JPS61202685U (en) | 1985-06-07 | 1985-06-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8659985U JPS61202685U (en) | 1985-06-07 | 1985-06-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202685U true JPS61202685U (en) | 1986-12-19 |
Family
ID=30638058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8659985U Pending JPS61202685U (en) | 1985-06-07 | 1985-06-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202685U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05240161A (en) * | 1991-11-08 | 1993-09-17 | Almatec Technische Innovationen Gmbh | Double membrane pump |
| JP2009299484A (en) * | 2008-06-10 | 2009-12-24 | Tacmina Corp | Pump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313203A (en) * | 1976-07-22 | 1978-02-06 | Saburou Masaki | Reciprocating pumps |
-
1985
- 1985-06-07 JP JP8659985U patent/JPS61202685U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5313203A (en) * | 1976-07-22 | 1978-02-06 | Saburou Masaki | Reciprocating pumps |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05240161A (en) * | 1991-11-08 | 1993-09-17 | Almatec Technische Innovationen Gmbh | Double membrane pump |
| JP2009299484A (en) * | 2008-06-10 | 2009-12-24 | Tacmina Corp | Pump |