JPH01134787U - - Google Patents
Info
- Publication number
- JPH01134787U JPH01134787U JP3063488U JP3063488U JPH01134787U JP H01134787 U JPH01134787 U JP H01134787U JP 3063488 U JP3063488 U JP 3063488U JP 3063488 U JP3063488 U JP 3063488U JP H01134787 U JPH01134787 U JP H01134787U
- Authority
- JP
- Japan
- Prior art keywords
- chamber connected
- pump
- check valve
- outlet
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Reciprocating Pumps (AREA)
Description
第１図は本考案に係る微流量ポンプの正面断面
図、第２図は同側面図、第３図はアクチユエータ
に対する逆止弁の支持構造を示す正面断面図であ
る。
２：出口通路、８：流出口、１３：流量センサ
、１８：流入口、２１：ポンプ、２９：アクチユ
エータ、３１，３３：ハウジング、３９：ポンプ
室、４０：吸込室、４１：逆止弁。
FIG. 1 is a front sectional view of a microflow pump according to the present invention, FIG. 2 is a side view thereof, and FIG. 3 is a front sectional view showing a support structure of a check valve with respect to an actuator. 2: outlet passage, 8: outlet, 13: flow rate sensor, 18: inlet, 21: pump, 29: actuator, 31, 33: housing, 39: pump chamber, 40: suction chamber, 41: check valve.
Claims (1)
振動板の周縁部を挾持して流入口に連なる吸込室
と流出口に連なるポンプ室とを区画し、バイモル
フ振動板の中心に吸込室からポンプ室への流れを
許す逆止弁を支持したことを特徴とする微流量ポ
ンプ。 The periphery of the bimorph diaphragm is sandwiched between the two-part housing to define a suction chamber connected to the inlet and a pump chamber connected to the outlet. A microflow pump characterized by supporting a check valve that allows flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3063488U JPH01134787U (en) | 1988-03-08 | 1988-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3063488U JPH01134787U (en) | 1988-03-08 | 1988-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01134787U true JPH01134787U (en) | 1989-09-14 |
Family
ID=31255865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3063488U Pending JPH01134787U (en) | 1988-03-08 | 1988-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01134787U (en) |
-
1988
- 1988-03-08 JP JP3063488U patent/JPH01134787U/ja active Pending