JPS5515293A - Absolute pressure type pressure senser - Google Patents
Absolute pressure type pressure senserInfo
- Publication number
- JPS5515293A JPS5515293A JP8910778A JP8910778A JPS5515293A JP S5515293 A JPS5515293 A JP S5515293A JP 8910778 A JP8910778 A JP 8910778A JP 8910778 A JP8910778 A JP 8910778A JP S5515293 A JPS5515293 A JP S5515293A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- diaphragm
- seal
- standard pressure
- membrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
PURPOSE: To evade change of standard pressure by positioning the free end of the bottom of an electrode hole in inner side of a space adjacent to a seal when a cap having an electrode hole for drawing an electrode disposed on standard pressure chamber and a diaphragm is jointed onto the diaphragm.
CONSTITUTION: To compose a diaphragm, on the inner surface of a N-type Si basic plate 2 recess 20 is disposed and on the outer surface P-type area 22 is formed in diffusion. Next, BSG membrane generated in this operation is deleted to form a fall 25 and whole surface are coated with SiO2 membrance 24. Thereafter the membrance 24 is also perforated to attach an electrode 27 for contacting with the area 22 and a cap having standard pressure chamber and an electrode hole 11 in whole surface is jointed through seal 5 and contact part 4. In this conststitution, the bottom free end of the electrode 11 is positioned in the inner side of the space 6 between the seal 5 and the contact 4 in the fall 25, so that the standard chamber 10 can be completely sealed from the outerside and vacuum maintenance is assured.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8910778A JPS5515293A (en) | 1978-07-20 | 1978-07-20 | Absolute pressure type pressure senser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8910778A JPS5515293A (en) | 1978-07-20 | 1978-07-20 | Absolute pressure type pressure senser |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5515293A true JPS5515293A (en) | 1980-02-02 |
JPS6148794B2 JPS6148794B2 (en) | 1986-10-25 |
Family
ID=13961660
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8910778A Granted JPS5515293A (en) | 1978-07-20 | 1978-07-20 | Absolute pressure type pressure senser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5515293A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5970522A (en) * | 1982-10-15 | 1984-04-21 | Matsushita Electric Works Ltd | Two layer extrusion forming metal mold |
JPS61140934U (en) * | 1985-02-22 | 1986-09-01 | ||
JPS63110670A (en) * | 1986-10-28 | 1988-05-16 | Nippon Denso Co Ltd | Electrostatic junction and semiconductor pressure sensor |
US4806289A (en) * | 1987-01-16 | 1989-02-21 | The Dow Chemical Company | Method of making a hollow light pipe |
US4871487A (en) * | 1987-01-16 | 1989-10-03 | The Dow Chemical Company | Method of making a polymeric optical waveguide by coextrusion |
US5641445A (en) * | 1995-07-25 | 1997-06-24 | Cadillac Rubber & Plastics, Inc. | Apparatus and method for extruding multi-layered fuel tubing |
-
1978
- 1978-07-20 JP JP8910778A patent/JPS5515293A/en active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5970522A (en) * | 1982-10-15 | 1984-04-21 | Matsushita Electric Works Ltd | Two layer extrusion forming metal mold |
JPS61140934U (en) * | 1985-02-22 | 1986-09-01 | ||
JPS63110670A (en) * | 1986-10-28 | 1988-05-16 | Nippon Denso Co Ltd | Electrostatic junction and semiconductor pressure sensor |
US4806289A (en) * | 1987-01-16 | 1989-02-21 | The Dow Chemical Company | Method of making a hollow light pipe |
US4871487A (en) * | 1987-01-16 | 1989-10-03 | The Dow Chemical Company | Method of making a polymeric optical waveguide by coextrusion |
US5641445A (en) * | 1995-07-25 | 1997-06-24 | Cadillac Rubber & Plastics, Inc. | Apparatus and method for extruding multi-layered fuel tubing |
Also Published As
Publication number | Publication date |
---|---|
JPS6148794B2 (en) | 1986-10-25 |
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