JPS5515293A - Absolute pressure type pressure senser - Google Patents

Absolute pressure type pressure senser

Info

Publication number
JPS5515293A
JPS5515293A JP8910778A JP8910778A JPS5515293A JP S5515293 A JPS5515293 A JP S5515293A JP 8910778 A JP8910778 A JP 8910778A JP 8910778 A JP8910778 A JP 8910778A JP S5515293 A JPS5515293 A JP S5515293A
Authority
JP
Japan
Prior art keywords
electrode
diaphragm
seal
standard pressure
membrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8910778A
Other languages
Japanese (ja)
Other versions
JPS6148794B2 (en
Inventor
Satoshi Shimada
Motohisa Nishihara
Hiroji Kawakami
Kiyomitsu Suzuki
Tomotsugu Inui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8910778A priority Critical patent/JPS5515293A/en
Publication of JPS5515293A publication Critical patent/JPS5515293A/en
Publication of JPS6148794B2 publication Critical patent/JPS6148794B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE: To evade change of standard pressure by positioning the free end of the bottom of an electrode hole in inner side of a space adjacent to a seal when a cap having an electrode hole for drawing an electrode disposed on standard pressure chamber and a diaphragm is jointed onto the diaphragm.
CONSTITUTION: To compose a diaphragm, on the inner surface of a N-type Si basic plate 2 recess 20 is disposed and on the outer surface P-type area 22 is formed in diffusion. Next, BSG membrane generated in this operation is deleted to form a fall 25 and whole surface are coated with SiO2 membrance 24. Thereafter the membrance 24 is also perforated to attach an electrode 27 for contacting with the area 22 and a cap having standard pressure chamber and an electrode hole 11 in whole surface is jointed through seal 5 and contact part 4. In this conststitution, the bottom free end of the electrode 11 is positioned in the inner side of the space 6 between the seal 5 and the contact 4 in the fall 25, so that the standard chamber 10 can be completely sealed from the outerside and vacuum maintenance is assured.
COPYRIGHT: (C)1980,JPO&Japio
JP8910778A 1978-07-20 1978-07-20 Absolute pressure type pressure senser Granted JPS5515293A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8910778A JPS5515293A (en) 1978-07-20 1978-07-20 Absolute pressure type pressure senser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8910778A JPS5515293A (en) 1978-07-20 1978-07-20 Absolute pressure type pressure senser

Publications (2)

Publication Number Publication Date
JPS5515293A true JPS5515293A (en) 1980-02-02
JPS6148794B2 JPS6148794B2 (en) 1986-10-25

Family

ID=13961660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8910778A Granted JPS5515293A (en) 1978-07-20 1978-07-20 Absolute pressure type pressure senser

Country Status (1)

Country Link
JP (1) JPS5515293A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970522A (en) * 1982-10-15 1984-04-21 Matsushita Electric Works Ltd Two layer extrusion forming metal mold
JPS61140934U (en) * 1985-02-22 1986-09-01
JPS63110670A (en) * 1986-10-28 1988-05-16 Nippon Denso Co Ltd Electrostatic junction and semiconductor pressure sensor
US4806289A (en) * 1987-01-16 1989-02-21 The Dow Chemical Company Method of making a hollow light pipe
US4871487A (en) * 1987-01-16 1989-10-03 The Dow Chemical Company Method of making a polymeric optical waveguide by coextrusion
US5641445A (en) * 1995-07-25 1997-06-24 Cadillac Rubber & Plastics, Inc. Apparatus and method for extruding multi-layered fuel tubing

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5970522A (en) * 1982-10-15 1984-04-21 Matsushita Electric Works Ltd Two layer extrusion forming metal mold
JPS61140934U (en) * 1985-02-22 1986-09-01
JPS63110670A (en) * 1986-10-28 1988-05-16 Nippon Denso Co Ltd Electrostatic junction and semiconductor pressure sensor
US4806289A (en) * 1987-01-16 1989-02-21 The Dow Chemical Company Method of making a hollow light pipe
US4871487A (en) * 1987-01-16 1989-10-03 The Dow Chemical Company Method of making a polymeric optical waveguide by coextrusion
US5641445A (en) * 1995-07-25 1997-06-24 Cadillac Rubber & Plastics, Inc. Apparatus and method for extruding multi-layered fuel tubing

Also Published As

Publication number Publication date
JPS6148794B2 (en) 1986-10-25

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