JPS61140934U - - Google Patents
Info
- Publication number
- JPS61140934U JPS61140934U JP2422085U JP2422085U JPS61140934U JP S61140934 U JPS61140934 U JP S61140934U JP 2422085 U JP2422085 U JP 2422085U JP 2422085 U JP2422085 U JP 2422085U JP S61140934 U JPS61140934 U JP S61140934U
- Authority
- JP
- Japan
- Prior art keywords
- seal cap
- strain gauge
- diaphragm
- pressure sensor
- semiconductor strain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は、本考案に係る圧力センサの断面図、
第２図はその圧力センサの構成部品であるシール
キヤツプの平面図、第３図はその断面図、第４図
は本考案に係る圧力センサの製造装置である容量
結合型プラズマＣＶＤ装置の概略図、第５図ない
し第７図は従来の圧力センサの断面図であり、第
５図は歪ゲージ接着型圧力センサの一例であり、
第６図および第７図は拡散型圧力センサの例を示
したものである。
３０……ダイヤフラム、３２……歪ゲージ、３
３……シールキヤツプ、３５……ボンデイング用
貫通孔、３６……ボンデイング用パツド、３７…
…外部接続用パツド、３９……ボンデイングワイ
ヤ、４０……電極棒。
FIG. 1 is a sectional view of a pressure sensor according to the present invention;
Fig. 2 is a plan view of a seal cap that is a component of the pressure sensor, Fig. 3 is a sectional view thereof, and Fig. 4 is a schematic diagram of a capacitively coupled plasma CVD apparatus that is a manufacturing apparatus for a pressure sensor according to the present invention. , FIGS. 5 to 7 are cross-sectional views of conventional pressure sensors, and FIG. 5 is an example of a strain gauge bonded pressure sensor,
6 and 7 show examples of diffusion type pressure sensors. 30...Diaphragm, 32...Strain gauge, 3
3... Seal cap, 35... Through hole for bonding, 36... Pad for bonding, 37...
... Pad for external connection, 39 ... Bonding wire, 40 ... Electrode rod.
Claims (1)
に半導体歪ゲージを形成した圧力センサにおいて
、内側に凹部を形成した蓋体状のシールキヤツプ
を前記半導体歪ゲージを覆うようにして前記ダイ
ヤフラムに装着し、前記シールキヤツプの外側に
ボンデイング用パツドと外部接続用パツドを形成
し、このボンデイング用パツドに隣接してボンデ
イングワイヤを通すための複数個の孔を前記シー
ルキヤツプに形成し、前記ボンデイングワイヤに
より前記ボンデイング用パツドと前記ダイヤフラ
ムの面上に形成された半導体歪ゲージ用電極とを
接続したことを特徴とする圧力センサ。 In a pressure sensor in which a semiconductor strain gauge is formed on the back side of a pressure-receiving surface of a diaphragm constituting a strain-generating section, a lid-shaped seal cap having a recess formed inside is attached to the diaphragm so as to cover the semiconductor strain gauge. , a bonding pad and an external connection pad are formed on the outside of the seal cap, a plurality of holes are formed in the seal cap adjacent to the bonding pad for passing a bonding wire, and the bonding wire connects the A pressure sensor characterized in that a bonding pad and a semiconductor strain gauge electrode formed on the surface of the diaphragm are connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2422085U JPS61140934U (en) | 1985-02-22 | 1985-02-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2422085U JPS61140934U (en) | 1985-02-22 | 1985-02-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61140934U true JPS61140934U (en) | 1986-09-01 |
Family
ID=30518173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2422085U Pending JPS61140934U (en) | 1985-02-22 | 1985-02-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61140934U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014238365A (en) * | 2013-06-10 | 2014-12-18 | 長野計器株式会社 | Sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367478A (en) * | 1976-11-29 | 1978-06-15 | Hitachi Ltd | Pressure detector |
| JPS5461975A (en) * | 1977-10-26 | 1979-05-18 | Hitachi Ltd | Detector of differential pressure, pressure and load |
| JPS5515293A (en) * | 1978-07-20 | 1980-02-02 | Hitachi Ltd | Absolute pressure type pressure senser |
-
1985
- 1985-02-22 JP JP2422085U patent/JPS61140934U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5367478A (en) * | 1976-11-29 | 1978-06-15 | Hitachi Ltd | Pressure detector |
| JPS5461975A (en) * | 1977-10-26 | 1979-05-18 | Hitachi Ltd | Detector of differential pressure, pressure and load |
| JPS5515293A (en) * | 1978-07-20 | 1980-02-02 | Hitachi Ltd | Absolute pressure type pressure senser |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014238365A (en) * | 2013-06-10 | 2014-12-18 | 長野計器株式会社 | Sensor |
| US9389134B2 (en) | 2013-06-10 | 2016-07-12 | Nagano Keiki Co., Ltd. | Synthetic resin based pressure sensor with a three-dimensional circuit |