JPS61203337U

JPS61203337U -

Info

Publication number: JPS61203337U
Application number: JP8787285U
Authority: JP
Priority date: 1985-06-11
Filing date: 1985-06-11
Publication date: 1986-12-20

Description

[Brief explanation of the drawing]

第１図は本考案に係る圧力センサのダイアフラ
ムの一実施例を示す断面図、第２図は従来例を示
す構成断面図、第３図は第２図のＡ―Ａ断面図で
ある。１８……ダイアフラム、１８ａ，１８ｂ，１８
ｃ，１８ｄ……厚肉部、１９，２０……ボデイ。 FIG. 1 is a cross-sectional view showing one embodiment of a diaphragm of a pressure sensor according to the present invention, FIG. 2 is a structural cross-sectional view showing a conventional example, and FIG. 3 is a cross-sectional view taken along line AA in FIG. 18...Diaphragm, 18a, 18b, 18
c, 18d... Thick wall portion, 19, 20... Body.

Claims

[Scope of utility model registration request]

A measuring diaphragm having a plurality of annular thick-walled parts concentrically formed on the surface of a silicon substrate, a body disposed opposite to each other on both sides of the diaphragm and forming a chamber together with the diaphragm, and a measuring diaphragm on one or both sides of the measuring diaphragm. comprising means for guiding the pressure and means for converting the displacement of the measuring diaphragm due to the differential pressure or pressure into an electrical signal;
When excessive pressure is applied to the measuring diaphragm,
In a pressure sensor having a pressure measuring part structured such that the thick part comes into contact with the wall surface of the one body to prevent destruction of the diaphragm, the root of the thick part is arranged at a height of 0.5 to 1. A pressure sensor characterized by forming an arc having a radius of 0 times.